abstract: Water affinity and condensation on Si-based surfaces is investigated to address the problem of fogging on silicone intraocular lenses (IOL) during cataract surgery, using Si(100), silica (SiO2) and polydimethylsiloxane (PDMS) silicone (SiOC2H6)n. Condensation is described by two step nucleation and growth where roughness controls heterogeneous nucleation of droplets followed by Ostwald ripening. Wetting on hydrophilic surfaces consists of continuous aqueous films while hydrophobic surfaces exhibit fogging with discrete droplets. Si-based surfaces with wavelength above 200 nm exhibit fogging during condensation. Below 200 nm, surfaces are found to wet during condensation. Water affinity of Si-based surfaces is quantified via the surface free energy (SFE) using Sessile drop contact angle analysis, the Young-Dupré equation, and Van Oss theory. Topography is analyzed using tapping mode atomic force microscopy (TMAFM). Polymer adsorption and ion beam modification of materials (IBMM) can modify surface topography, composition, and SFE, and alter water affinity of the Si-based surfaces we studied. Wet adsorption of hydroxypropyl methylcellulose (HPMC) C32H60O19 with areal densities ranging from 1018 atom/cm2 to 1019 atom/cm2 characterized via Rutherford backscattering spectrometry (RBS), allows for the substrate to adopt the topography of the HPMC film and its hydrophilic properties. The HPMC surface composition maintains a bulk stoichiometric ratio as confirmed by 4.265 MeV 12C(α, α)12C and 3.045 MeV 16O(α, α)16O, and 2.8 MeV He++ elastic recoil detection (ERD) of hydrogen. Both PIXE and RBS methods give comparable areal density results of polymer films on Si(100), silica, and PDMS silicone substrates. The SFE and topography of PDMS silicone polymers used for IOLs can also be modified by IBMM. IBMM of HPMC cellulose occurs during IBA as well. Damage curves and ERD are shown to characterize surface desorption accurately during IBMM so that ion beam damage can be accounted for during analysis of polymer areal density and composition. IBMM of Si(100)-SiO2 ordered interfaces also induces changes of SFE, as ions disorder surface atoms. The SFE converges for all surfaces, hydrophobic and hydrophilic, as ions alter electrochemical properties of the surface via atomic and electronic displacements. / Dissertation/Thesis / Ph.D. Physics 2011

Die vorliegende Arbeit beschreibt die Implementierung ionenstrahlanalytischer Methoden zur Charakterisierung der Probenzusammensetzung in einem Helium-Ionen-Mikroskop mit einem auf unter einen Nanometer fokussierten Ionenstrahl. Zur Bildgebung wird dieser im Mikroskop über Probenoberflächen gerastert und die lokale Ausbeute an Sekundärelektronen gemessen. Obwohl sich damit ein hoher topografischer Kontrast erzeugen lässt, lassen sich weder aus der Ausbeute noch aus der Energieverteilung der Sekundärelektronen verlässliche Aussagen zur chemischen Zusammensetzung der Probe treffen. Daher wurden in dieser Arbeit verschiedene ionenstrahlinduzierte Sekundärteilchen hinsichtlich ihrer Eignung für die Elementanalytik im Helium-Ionen-Mikroskop verglichen. Zur Evaluation standen der Informationsgehalt der Teilchen, deren Analysierbarkeit sowie deren verwertbare Ausbeute. Die Spektrometrie rückgestreuter Teilchen sowie die Sekundärionen-Massenspektrometrie wurden dabei als die geeignetsten Methoden identifiziert und im Detail untersucht. Gegenstand der Untersuchung waren physikalische Limitierungen und Nachweisgrenzen der Methoden sowie deren Eignung zum Einbau in ein Helium-Ionen-Mikroskop. Dazu wurden verschiedene Konzepte von Spektrometern evaluiert, erprobt und hinsichtlich ihrer Effizienz, Energieauflösung und Umsetzbarkeit im Mikroskop bewertet. Die Flugzeitspektrometrie durch Pulsen des primären Ionenstrahls konnte als die geeignetste Technik identifiziert werden und wurde erfolgreich in einem Helium-Ionen-Mikroskop implementiert. Der Messaufbau, die Signal- und Datenverarbeitung sowie vergleichende Simulationen werden detailliert beschrieben. Das Spektrometer wurde weiterhin ausführlich hinsichtlich Zeit-, Energie- und Massenauflösung charakterisiert. Es werden ortsaufgelöste Rückstreuspektren vorgestellt und damit erstmalig die Möglichkeit zur Ionenstrahlanalytik im Helium-Ionen-Mikroskop auf einer Größenskala von ≤ 60 nm aufgezeigt. Das Pulsen des primären Ionenstrahls erlaubt es zudem, die Technik der Sekundärionen-Massenspektrometrie anzuwenden. Diese Methode bietet Informationen zur molekularen Probenzusammensetzung und erreicht für einige Elemente niedrigere Nachweisgrenzen als die Rückstreuspektrometrie. Damit konnten erstmalig im Helium-Ionen-Mikroskop gemessene Sekundärionen-Massenspektren sowie die ortsaufgelöste Elementanalyse durch spektrometrierte Sekundärionen demonstriert werden. Die Ergebnisse dieser Arbeit sind in der Fachzeitschrift Ultramicroscopy Band 162 (2016) S. 91–97 veröffentlicht. Ab Oktober 2016 werden diese auch in Form eines Buchkapitels in dem Buch „Helium Ion Microscopy“, Springer Verlag Heidelberg zur Verfügung stehen. / The present work describes the implementation of ion beam analysis methods in a helium-ion-microscope for the determination of sample compositions with a focused ion beam of < 1 nm size. Imaging in the microscope is realized by scanning the focused ion beam over the sample surface while measuring the local secondary electron yield. Although this procedure leads to a high topographical contrast, neither the yield nor the energy distribution of the secondary electrons deliver reliable information on the chemical composition of the sample. For this purpose, in this work different ion beam induced secondary particles were compared with respect to their suitability for the analysis of the chemical composition in the helium-ion-microscope. In particular the information content of the particles, their analysability and their yield were evaluated. As a result, the spectrometry of backscattered particles and the mass spectrometry of sputtered secondary ions were identified as the most promising methods and regarded in detail. The investigation focused on physical limitations and detection limits of the methods as well as their implementability into a helium-ion-microscope. Therefor various concepts of spectrometers were evaluated, tested and validated in terms of their efficiency, energy resolution and practicability in the microscope. Time-of-flight spectrometry by pulsing the primary ion beam could be identified as the most suitable technique and has been successfully implemented in a helium-ion-microscope. The measurement setup, signal processing and data handling as well as comparative simulations are described in detail. Further the spectrometer was characterized explicitly in terms of time, energy and mass resolution. Spatially resolved backscattering spectra will be shown demonstrating the feasibility of performing ion beam analysis in a helium-ion-microscope for the first time on a size scale of ≤ 60 nm. By pulsing the primary ion beam the technique of secondary ion mass spectrometry becomes automatically accessible. This method provides information on the molecular composition of samples and can reach higher detection limits than those from backscattering spectrometry. For the first time, in a helium-ion-microscope measured secondary ion mass spectra and spatially resolved elemental analysis by spectrometry of secondary ions, could be demonstrated. The results of this work are published 2016 in the scientific journal Ultramicroscopy, volume 162 on pages 91 to 971. In October 2016 there will be another publication as a book chapter in „Helium Ion Microscopy“ (publisher: Springer Verlag Heidelberg).

PIXE, Particle Induced X-ray Emission, est une méthode d’analyse multiélémentaire, rapide, non destructive, basée sur la détection des rayons X caractéristiques émis suite à l’interaction de particules chargées avec la matière. Cette méthode est usuellement utilisée avec des protons accélérés à une énergie de l’ordre de quelques MeV dans des domaines d’applications variés, atteignant une limite de détection de l’ordre de quelques μg/g (ppm). Cependant, la profondeur d’analyse est relativement limitée. Grâce au cyclotron ARRONAX, nous pouvons utiliser des protons ou des particules alpha jusqu’à une énergie de 70 MeV pour mettre en œuvre la technique PIXE à haute énergie. Avec de telles énergies, nous excitons préférentiellement les raies X K, plus énergétiques que les raies L utilisées dans la PIXE classique pour l’analyse des éléments lourds. L’analyse d’échantillons épais, en profondeur, est ainsi accessible. Pour l’analyse des éléments légers, nous pouvons utiliser la détection de rayons gamma émis pas les noyaux excités en combinant les méthodes PIGE et PIXE. Nous allons tout d’abord présenter les caractéristiques et les principes d’analyse de la méthode PIXE à haute énergie que nous avons développée à ARRONAX. Nous détaillerons ensuite les performances atteintes, notamment en termes de limite de détection dans différentes conditions expérimentales. Enfin, nous présenterons les résultats obtenus pour l’analyse d’échantillons multicouches et la quantification d’éléments traces dans des échantillons épais. / Particle Induced X-ray Emission (PIXE) is a fast, nondestructive, multi-elemental analysis technique. It is based on the detection of characteristic X-rays due to the interaction of accelerated charged particles with matter. This method is successfully used in various application fields using low energy protons (energies around few MeV), reaching a limit of detection of the order the μg/g (ppm). At this low energy, the depth of analysis is limited. At the ARRONAX cyclotron, protons and alpha particles are delivered with energy up to 70 MeV, allowing the development of the High Energy PIXE technique. Thanks to these beams, we mainly produce KX-rays, more energetic than the LX-rays used with standard PIXE for the heavy elements analysis. Thus, in depth analysis in thick materials is achievable. For light element analysis, the PIGE technique, based on the detection of gamma rays emitted by excited nuclei, may be used in combination with PIXE. First of all, we will introduce the characteristics and principles of high energy PIXE analysis that we have developed at ARRONAX. Then we will detail the performance achieved, particularly in terms of detection limit in various experimental conditions. Finally, we present the results obtained for the analysis of multilayer samples and quantification of trace elements in thick samples.

Heavy Ion Elastic Recoil Detection Analysis (HIERDA) is a versatile Ion Beam Analysis technique well suited to multi-elemental depth profiling of thin layered structures and near-surface regions of materials. An existing limitation is the inability to accurately account for the pronounced broadening and tailing effects of multiple scattering typically seen in HIERDA spectra. This thesis investigates the role of multiple large angle scattering in heavy ion applications such as HIERDA, and seeks to quantify its contribution to experimental output. This is achieved primarily by the development of a computer simulation capable of predicting these contributions and using it to classify and quantify the interactions that cause them. Monte Carlo ion transport simulation is used to generate simulated HIERDA spectra and the results are compared to experimental data acquired using the Time of Flight HIERDA facility at the Australian Nuclear Science and Technology Organisat ion. A Monte Carlo simulation code was adapted to the simulation of HIERDA spectra with considerable attention on improving the modelling efficiency to reduce processing time. Efficiency enhancements have achieved simulation time reductions of two to three orders of magnitude. The simulation is shown to satisfactorily reproduce the complex shape of HIERDA spectra. Some limitations are identified in the ability to accurately predict peak widths and the absolute magnitude of low energy tailing in some cases. The code is used to identify the plural scattering contribution to the spectral features under investigation, and the complexity of plurally scattered ion and recoil paths is demonstrated. The program is also shown to be useful in the interpretation of overlapped energy spectra of elements of similar mass whose signals cannot be reliably separated experimentally. The effect of large angle scattering on the transmission of heavy ions through a nano-scale aperture mask, used to collimate an ion beam to a very small beam spot, is modelled using a version of the program adapted to handle the more complex geometry of the aperture mask. The effectiveness of nano-aperture collimation was studied for a variety of ion-energy combinations. Intensity, energy, and angular distributions of transmitted ions were calculated to quantify the degree to which scattering within the mask limits the spatial resolution achievable. The simulation successfully predicted the effect of misaligning the aperture and the beam, and the result has subsequently been observed experimentally. Transmitted ion distributions showed that the higher energy heavier ions studied are more effectively collimated than are lower energy lighter ions. However, there is still a significant probability of transmission of heavy ions with substantial residual energy beyond the perimeter of the aperture. For the intended application, ion beam lithography, these ions are likely to be problematic. The results indicate that medium energy He ions are the more attractive option, as the residual energy of scattered transmitted ions can be more readily managed by customising the etching process. Continuing research by experimentalists working in this area is proceeding in this direction as a result of the conclusions from this work.

One major step needed for fusion to become a reliable energy source is the development of materials for the extreme conditions (high temperature, radioactivity and erosion) caused by hot plasmas. The main goal of the present study is to use and optimise ion beam methods (lateral resolution and sensitivity) to characterise the distribution of hydrogen isotopes that act as fuel. Materials from the test reactors JET (Joint European Torus), TEXTOR (Tokamak Experiment for Technology Oriented Research) and Tore Supra have been investigated. Deuterium, beryllium and carbon were measured by elastic recoil detection analysis (ERDA) and nuclear reaction analysis (NRA). To ensure high 3D spatial resolution a nuclear microbeam (spot size &lt;10 µm) was used with 3He and 28Si beams. The release of hydrogen caused by the primary ion beam was monitored and accounted for. Large variations in surface (top 10 µm) deuterium concentrations in carbon fibre composites (CFC) from Tore Supra and TEXTOR was found, pointing out the importance of small pits and local fibre structure in understanding fuel retention. At deeper depths into the CFC limiter tiles from Tore Supra, deuterium rich bands were observed confirming the correlation between the internal material structure and fuel storage in the bulk. Sample cross sections from thick deposits on the JET divertor showed elemental distributions that were dominantly laminar although more complex structures also were observed. Depth profiles of this kind elucidate the plasma-wall interaction and material erosion/deposition processes in the reactor vessel. The information gained in this thesis will improve the knowledge of first wall material for the next generation fusion reactors, concerning the fuel retention and the lifetime of the plasma facing materials which is important for safety as well as economical reasons.

Dans les nouvelles centrales nucléaires dites 4ème génération, comme d’ailleurs les anciennes, le dioxyde d’uranium devra opérer dans des milieux hostiles de températures et d’irradiation avec la présence des produits de fission (PF) et des particules alpha (α). Le fonctionnement dans ces conditions extrêmes induira des déplacements d’atomes et dégradera les propriétés thermiques et mécaniques du combustible UO2. La compréhension du comportement des défauts lacunaires, des PF et de l’hélium est cruciale pour prévoir le comportement du dioxyde d’uranium au sein de ces futures installations nucléaires. La première partie de cette thèse est consacrée à l’étude des défauts lacunaires induits par l’implantation de krypton et d’iode (quelques MeV) dans l’UO2 polycristallin et leurs stades de recuits. L’analyse par spectroscopie d’annihilation de positons (PAS) a permis de mettre en évidence la création de défauts de Schottky VU-2VO dans le cas des implantations iode et la formation de clusters lacunaires contenant du gaz pour les implantations krypton. L’évolution en température de ces défauts générés dépend des paramètres d’implantation (nature des ions, énergie, fluence). Cette étude a montré les rôles importants que peuvent jouer les défauts lacunaires et la présence des gaz de fission dans l’évolution du matériau UO2. Ensuite, nous nous sommes intéressés à l’étude et à la caractérisation, par PAS et les techniques d’analyse par faisceau d’ions (NRA/C et RBS/C), du comportement de l’hélium dans l’UO2. Les mesures de NRA/C et RBS/C révèlent une localisation d’une grande fraction d’hélium dans les sites interstitiels octaédriques de la matrice UO2. La localisation de l’hélium reste stable dans ces sites pour T< 600°C, évoluent légèrement entre 600 et 700°C et devient aléatoire à 800°C. Les mesures PAS mettent en évidence trois stades d’évolution des défauts lacunaires : la recombinaison par migration des interstitiels d’oxygène, l’agglomération des défauts entre 600 et 800°C et leur dissociation et élimination lorsque la température augmente. Ces résultats suggèrent que le transport d'hélium est assisté par les défauts lacunaires. / In the new fourth generation nuclear plants, as in the old ones, uranium dioxide must operate in hostile environments of temperature and irradiation with the presence of fission products (FP) and alpha particles (α). Operation in these extreme conditions will induce atoms displacements and degrade the thermal and mechanical properties of UO2 fuel. Understanding the behavior of induced vacancy defects, FP and helium is crucial to predict the uranium dioxide behavior in the future nuclear reactors. The first part of this thesis is dedicated to the study of vacancy defects induced by krypton and iodine implantation (a few MeV) in the UO2 polycrystalline and of their evolution under annealing. Analysis by positron annihilation spectroscopy (PAS) has highlighted the creation of Schottky defects VU-2VO in the case of iodine implantations and formation of vacancy clusters containing the gas for krypton implantation. The temperature evolution of these defects depends on the implantation parameters (nature of the ion energy, fluence). This study showed the important roles that can play vacancy defects and the presence of fission gases in the evolution of UO2 material. Then we were interested in the study of the helium behavior in UO2 its location and migration, agglomeration and interaction with vacancy defects by using PAS and ion beam analysis (NRA/C and RBS/C). The NRA/C and RBS/C characterizations showed a localization of a large helium fraction in the octahedral interstitial sites of the UO2 matrix. The helium location in these sites remains stable for T <600°C, changing slightly between 600 and 700°C and becomes random at 800°C. Positron annihilation spectroscopy reveals three stages of vacancy defects evolution : The recombination with oxygen interstitial migration, defects agglomeration between 600 and 800°C and their dissociation and elimination when the temperature increases. These results suggest that the He transport is assisted by the vacancy defects.

Cette thèse présente de nouveaux développements en détection de particules chargées et traitement tout-numérique d'impulsions pour application à l'analyse avec des faisceaux d'ions rapides (IBA). Un ensemble de 16 détecteurs gravés sur une puce de Si est mis en œuvre, ce qui fournit un angle solide de détection environ 100 fois plus grande que celle des détecteurs utilisés auparavant pour l'IBA. Seize chaines d'acquisition sont également mises en œuvre avec une approche 'tout-numérique' pour le traitement des signaux issus des détecteurs. Dans son ensemble, le système ainsi développé a une résolution en énergie équivalent à celle des détecteurs standards. La considérable quantité d'information ainsi générée est traitée de manière cohérente en ajustant des spectres en énergie simulé aux spectres mesurés grâce à un algorithme de recuit simulé, avec le NDF DataFurnace. Les grandes angles solides disponibles sont exploitées pour des études par rétrodiffusion de Rutherford (RBS) et canalisation d'ions de l'isolant topologique Bi2Se3 enrichi en fer en vue d'études de l'effet thermoélectrique, de spintronique ou encore la computation quantique, ainsi que pour des études par RBS et analyse par réactions nucléaires (NRA) de matériaux pour la photovoltaïque organique, basés sur tetraphenyldibenzoperiflanthene (DBP) comme photo-absorbant avec oxydes de métaux de transition pour injection de charge. / This thesis presents new developments in charged particle detection and digital pulse processing for application in analysis with fast ion beams - Ion Beam Analysis (IBA). In particular a charged particle detector array, consisting of 16 independent charged particle detectors on a single silicon chip is implemented giving an overall solid angle of detection around two orders of magnitude greater than the standard charged particle detectors used in IBA. Sixteen parallel data acquisition channels are implemented using a fully digital approach for nuclear pulse processing. The overall system has an energy resolution equivalent to that of standard detectors. The large amount of data generated is handled in a self-consistent way by spectrum fitting with a simulated annealing algorithm via the NDF DataFurnace. The large solid angles thus achieved are exploited in Rutherford Backscattering Spectrometry (RBS) and ion channelling studies of the topological insulator Bi2Se3 enriched in Fe, in view of studies of the thermo-electric effect, spintronics and quantum computing, and in RBS and Nuclear Reaction Analysis (NRA) studies of organic photovoltaic materials based on tetraphenyldibenzoperiflanthene (DBP) as the photo-absorber and transition metal oxide charge injectors.

L’intercalation de métaux dans le graphite a été réalisée pour la première fois en 1926. Depuis cette découverte, de nombreux composés binaires et ternaires ont été synthétisés. Au cours de ce travail, la méthode solide-liquide en milieu alliage fondu à base d’alcalin a d’abord été utilisée afin d’intercaler l’or dans le graphite à l’aide du potassium. Puis, l’intercalation du calcium dans des matériaux B-C-N de structure graphitique a été réalisée par le biais du lithium. La diffraction des rayons X, l’analyse par faisceau d’ions, la microscopie électronique ainsi que les techniques spectroscopiques associées ont été mises en œuvre pour caractériser ces nouveaux composés. Dans le cas du système graphite-potassium-or, trois nouveaux composés ternaires de premier stade et de distances interplanaires très différentes (1311, 953 et 500 pm) ont pu être synthétisés. Le composé K1,3Au1,5C4 a été isolé de façon reproductible et présente selon l’axe c une séquence d’empilement K-Au-Au-Au-K pour l’insérat. L’étude du mécanisme d’intercalation menant à ce composé a mis en évidence un intermédiaire réactionnel de formule K1,6Au0,7C4 dont le feuillet inséré est tricouche. Le troisième composé, KAu0,7C4, constitué de deux couches mixtes or-potassium, s’est quant à lui révélé métastable. Parallèlement, l’intercalation d’un alliage Li-Ca dans le matériau B-C-N a été réalisée avec succès. L’analyse par faisceau d’ions de l’hôte a permis de doser sur un même échantillon la teneur en bore, carbone et azote, conduisant à une formule B2C5N. Les mesures effectuées sur le matériau intercalé montrent la préservation du réseau hôte et l’insertion de 0,6 atome de lithium par atome de calcium / Since the discovery in 1926 of the first graphite intercalation compounds containing alkali metals, numerous binary and ternary compounds have been synthesized. In this work, solid-liquid method in alkali metal based molten alloys has been employed to intercalate gold into graphite using potassium as an intercalation vector for opening the van der Waals’s gaps and decreasing the reaction temperature. Then, lithium has been used to assist the intercalation of calcium into B-C-N compounds. X-ray diffraction, ion beam analysis, electron microscopy and associated spectroscopy techniques have been performed to characterize the as-prepared compounds. In the case of graphite-potassium-gold system, three novel ternary first stage intercalation compounds with very different repeat distances (1311, 953 and 500 pm) have been synthesized. The K1.3Au1.5C4 compound, isolated in a reproducible fashion, presents a K-Au-Au-Au-K c-axis stacking sequence for the intercalated sheets. The study of its intercalation mechanism evidenced an intermediate product which chemical formula is K1.6Au0.7C4, with three-layered intercalated sheets. The third compound KAu0.7C4 is metastable and contains in each van der Waals‘s gap two successive layers containing a mixture of gold and potassium. Elsewhere, the intercalation of a Li-Ca alloy into B-C-N host material has been successfully carried out. The ion beam analysis of the pristine B-C-N lead to determine on a same sample the amount of boron, carbon and nitrogen with the corresponding B2C5N formula. The experiments realized on the intercalated compound showed the preservation of the host lattice and the intercalation of 0.6 lithium per calcium atom

Este trabalho tem por objetivo a caracterização de filmes finos de óxido de alumínio produzidos por deposição assistida por feixe de íons Ar+. Tal caracterização consiste em estabelecer a relação entre os parâmetros de produção (energia do feixe e uxo relativo de Ar), a composição e a estrutura dos lmes. Para tanto, utiliza-se técnicas de microscopia de força atômica, difração de raios-x, reetividade de raios-x e análise por feixe iônico. Resultados mostram que amostras produzidas à temperatura ambiente e à 450 oC são amorfas independentemente da energia do feixe iônico. Filmes formados com assistência de feixe possuem qualidade superior àqueles formados por deposição física de vapor. O bombardeamento de íons Ar+ mostra-se capaz de controlar a concentração de hidrogênio, a estequiometria, a rugosidade, o tamanho dos grãos e a densidade dos lmes nos. Amostras com excelente qualidade baixa rugosidade, estequiometria próxima da ideal e boa densidade foram produzidas utilizando íons com energia dentre 300 eV e 600 eV. / The scope of this work is the characterization of aluminum oxide thin films produced by Ar+ ion beam assisted deposition. This characterization consists in establishing the relationship between production parameters (ion beam energy and argon relative ux), structure and composition of these lms. In order to undertake this task, the following techniques were used: atomic force microscopy, x-ray diraction, x-ray reectivity and ion beam analysis. Results show that samples produced at room temperature and at 450 oC are amorphous regardless the ion beam energy. Films grown under ion assistance have better characteristics than the ones deposited by physical vapor deposition. The ion beam bombardment is capable of controlling hydrogen concentration, stoichiometry, roughness, grain size and density of alumina samples. High quality lms at surface and increased density lms with near ideal stoichiometry were produced with 300 eV and 600 eV ion beam energy.

Obwohl Wasserstoff omnipräsent ist, ist seine Analytik anspruchsvoll und es stehen nur wenige analytische Verfahren zur Auswahl. Unter diesen nimmt die auf einer Kernreaktion von Wasserstoff und Stickstoff basierende N-15-Methode einen herausragenden Platz ein. Sie liefert eine ortsaufgelöste Wasserstoffkonzentration bis in den ppm-Bereich in oberflächennahen Schichten (kleiner 2 µm). Gegenstand der Arbeit sind die Darstellung der Theorie der N-15-Kernreaktionsanalyse (NRA), des experimentellen Aufbaus des entsprechenden Strahlrohrs am Ionenbeschleuniger der BAM und der Auswertung der Messergebnisse. Ziel ist die erstmalige Charakterisierung eines Referenzmaterials für die H-Analytik auf Basis von amorphen Silizium (aSi) auf einem Si[100]-Substrat. International wird von den metrologischen Instituten NIST [REE90] und IRMM [VAN87] je ein Referenzmaterial für die Heißextraktion in Form von Titanplättchen angeboten. Diese sind aber für die oberflächennahen Verfahren (NRA, ERDA, GDOES, SIMS) nicht nutzbar, da die oberflächennahe Konzentration von Wasserstoff in Titan nicht konstant ist. Die Homogenität der mittels CVD abgeschiedenen aSi:H-Schichten wurde untersucht. Dazu wurden pro Substrat für ca. 30 Proben die Wasserstofftiefenprofile gemessen, mittels eines innerhalb der Arbeit entstandenen Programms entfaltet und der statischen Auswertung unterzogen. Das Ergebnis waren Mittelwert und Standardabweichung der Wasserstoffkonzentration, sowie ein Schätzer für den Beitrag der Inhomogenität zur Meßunsicherheit. Die Stabilität des potentiellen Referenzmaterials wurde durch die Konstanz der Ergebnisse von Wiederholtungsmessungen der Wasserstoffkonzentrtion während der Applikation einer hohen Dosis von N-15 Ionen bewiesen. In einem internationalen Ringversuch wurde die Rückführbarkeit der Messergebnisse nachgewiesen. Teilnehmer waren 13 Labore aus 7 Ländern. Eingesetzt wurden N-15 und F-19 NRA, ERDA und SIMS. Besonderer Beachtung wurde der Bestimmung der Messunsicherheiten gewidmet. Für die Charakterisierung der aSi:H-Schichten wurden neben der NRA die Weißlichtinterferometrie, Ellipsometrie, Profilometrie und Röngenreflektometrie, sowie die IR- und Ramanspektroskopie genutzt. Die Stöchiometrie des eingesetzten Standardmaterials Kapton wurde mittels NMR-Spekroskopie und CHN-Analyse überprüft. [VAN87] Vandendriessche, S., Marchandise, H., Vandecasteele, C., The certification of hydrogen in titanium CRM No318, Brüssel-Luxembourg,1987 [REE90] Reed, W.P., Certificate of Analysis SRM 352c, Gaithersburg, NIST, 1990