京都大学 / 0048 / 新制・課程博士 / 博士(人間健康科学) / 甲第19970号 / 人健博第38号 / 新制||人健||3(附属図書館) / 33066 / 京都大学大学院医学研究科人間健康科学系専攻 / (主査)教授 杉本 直三, 教授 精山 明敏, 教授 黒田 知宏 / 学位規則第4条第1項該当 / Doctor of Human Health Sciences / Kyoto University / DFAM

Las estructuras periódicas macroscópicas han sido objeto de una intensa investigación durante las dos últimas décadas debido a su capacidad de imitar fenómenos ondulatorios que son inherentes a la escala atómica. Aunque las placas perforadas son estructuras muy comunes en acústica, éstas parecen guardar propiedades de transmisión de sonido inexploradas, cuyo estudio ha sido impulsado por el descubrimiento de la Transmisión Óptica Extraordinaria en láminas de metal perforadas con agujeros distribuidos periódicamente cuando interactúan con la luz. En el presente trabajo se muestra que las placas perforadas no sólo presentan máximos de transmisión total resonante y mínimos de la anomalía de Wood cuando los agujeros están distribuidos de forma periódica, sino también apantallamiento acústico extraordinario debido al cortocircuito hidrodinámico producido por el acoplamiento entre la placa y el fluido. También se detalla el rol de los parámetros geométricos de las placas perforadas en las características de transmisión, ilustrando diferentes estrategias para moldear el espectro de transmisión. La transmisión acústica a través de placas de aluminio con perforaciones regulares sumergidas en agua presenta una alta complejidad tanto a incidencia normal como cuando se varía el ángulo de incidencia del sonido. Aparecen ondas de superficie radiantes provenientes de la vibración de la placa, lo cual es demostrado usando un nuevo modelo teórico que incluye el acoplamiento elastoacústico completo. Gracias al estudio complementario de la transmisión y la propagación en placa de una placa fonónica sólido-sólido se retrata una perspectiva completa del efecto del acoplamiento. Como consecuencia directa, se observan fenómenos de plegamiento y bandas de propagación prohibida en modos tipo Scholte-Stoneley sin necesidad de corrugaciones o de agujeros. Finalmente, se comparan las propiedades de transmisión de agujeros individuales y redes de agujeros para luz, electrones y sonido analizando y comentando sus diferencias. Se ha encontrado que, aunque para la luz la red de agujeros en sí misma lleva a transmisiones del 100% y modos atrapados a la superficie, esto no se produce ni para electrones ni para sonido. En consecuencia, las resonancias del agujero constituyen el mecanismo clave que posibilita la existencia de fenómenos exóticos en sonido. Los resultados principales aquí mencionados son explicados de manera detallada y comentados sobre la base de datos teóricos y experimentales. El objetivo general de esta tesis es dilucidar por medios teóricos y experimentales los fenómenos físicos que se hayan involucrados en la transmisión acústica a través de placas perforadas. En este estudio se usa esencialmente el método de transmisión de ultrasonidos bajo el agua. Los modelos teóricos desarrollados tienen en cuenta la configuración experimental para poder establecer comparaciones precisas entre las medidas y los cálculos. Se toman en cuenta diversos factores que pueden modificar la transmisión de sonido a través de placas perforadas tales como: - La orientación de la onda incidente con respecto a la placa. .- Los parámetros geométricos que definen la placa, es decir, la distancia entre agujeros, el diámetro de los mismos y el espesor de la placa. .- Los parámetros elásticos relacionados con el contraste de impedancia entre el sólido y el fluido. .- El material contenido en los agujeros, de modo que se estudian no sólo placas fonónicas constituidas por un fluido y un sólido sino también aquellas formadas por dos sólidos distintos. Para el caso particular de una placa fonónica constituida por dos sólidos se emplea además una técnica para medir las vibraciones de la placa directamente en su superficie con el fin de complementar las medidas de transmisión de ultrasonidos. Desde una perspectiva teórica, el problema ha sido abordado para estructuras infinitas partiendo de diversas hipótesis. / Estrada Beltrán, HA. (2011). Ultrasonic transmission through periodically perforated plates [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/14119

La reconstruction passive des fonctions de Green par corrélation de bruit ambiant suscite aujourd’hui un grand intérêt en contrôle santé intégré (CSI). Dans ce manuscrit, nous proposons une méthode originale reposant sur l’application de cette approche pour détecter et localiser des défauts (fissures, trous, rainures) dans des plaques minces réverbérantes avec un faible nombre de capteurs. Les ondes de flexion qui se propagent sur la plaque sont engendrées soit par un ensemble de sources aléatoirement réparties sur la surface ou un bruit ambiant. Un réseau de capteurs sensibles au déplacement normal permet d’estimer la matrice de corrélations inter-éléments avant et après l’apparition d’un défaut. Un critère d’évaluation de la qualité des corrélations est proposé sous forme d’un niveau de bruit relatif entre les résidus de reconstruction et les fonctions de Green. La matrice différentielle de corrélations avant et après défaut est utilisée pour l’imagerie de défaut. En dépit de la reconstruction imparfaite des réponses impulsionnelles, la technique proposée s’avère comparable aux méthodes actives avec une excellente résolution. On a proposé ensuite une extension de la méthode passive par corrélation de champs pour l’identification des zones de bruit. Un filtrage basé sur la technique de décomposition en valeurs singulières (DORT) est tout particulièrement utilisé pour améliorer les images de localisation. Des sources acoustiques secondaires ont été développées pour la translation du bruit ambiant basses fréquences en composantes hautes fréquences, utilisées pour localiser des défauts dans des plaques. Enfin, on a montré que ce type de méthode pourrait être également utilisé pour caractériser un défaut dans une structure réverbérante, en particulier, il a été souligné que l’intensité des images de localisation obtenues est liée à la section de diffusion de celui-ci. / Green’s functions retrieval from ambient noise correlation has recently drawn a new interest in structural health monitoring. In this manuscript, we propose an original method based on this approach to detect and locate defects (cracks, holes, grooves) in a reverberant thin plate with a limited number of sensors. Flexural waves that propagate on the plate are generated by either a set of sources distributed randomly on the surface or an ambient noise. Covariance matrices are estimated from the sparse array after damage and compared to baseline-correlation matrix recorded from the healthy plate. An evaluation criterion has developed in the form of relative noise level to predict the quality of the GF reconstruction. The differential correlation matrix w/o defect is used to localize the defect. We have shown numerically and experimentally that this technique is exploitable for defect detection and localization, despite a non-perfect estimation of the GF. We have also proposed a passive technique to identify the regions of noise. A filtering technique based on the singular value decomposition is shown to improve the detection. A secondary acoustic sources have been developped to harvesting the LF ambient noise to HF field, used to localize defects in platelike structures. Finally, it was shown that such method could also be used to characterize a defect in a reverberant structure, in particular, it has been drawn that the obtained images intensity is related to the defect cross-section.

L’objectif de cette thèse est de réaliser un système de Contrôle Santé Intégré des structures aéronautiques (CSI ou SHM) autonome et à double-fonctionnalité. Ce système doit être en mesure d’assurer son autonomie énergétique tout en réalisant les tâches de détection et de localisation des endommagements. Latechnique retenue pour alimenter ce système est basée sur la récupération d’énergie vibratoire par transducteurs piézoélectriques SHM collés. Durant ces travaux, un modèle analytique complet de la chaîne de récupération d’énergie vibratoire a d’abord été créé. Ce modèle, validé par la Méthode des ÉlémentsFinis (MEF), permet d’améliorer le rendement du système en déterminant les dimensions, les locali-sations et le type de matériau piézoélectrique idéals des transducteurs. Ce modèle a ensuite été étendu à une configuration plus représentative des conditions de vibrations d’une structure en vol. Une bonne corrélation entre les résultats provenant du modèle prédictif et les essais sur un banc de mesures a étémise en évidence. Une puissance de 1.67mW a été récupérée et la capacité large bande des transducteurs a été vérifiée. L’application de la récupération d’énergie au contrôle de structures composites en cours d’assemblage sur les lignes de production a également été étudiée. Dans ce cas, un transducteur stratégiquement localisé et alimenté par une source de tension disponible génère des ondes de Lambdans la structure afin de pallier l’absence de vibrations naturelles. Un réseau de transducteurs secondaires disséminés sur cette structure récupère et convertit cette énergie vibratoire en énergie électrique. Une puissance de 7.36 mW a été récoltée et ce système a été en mesure de détecter une chute d’outil sur le composite et d’éclairer de façon autonome une diode électroluminescente (DEL) simulant ici la consommation de la transmission sans fil de l’information. / The aim of this thesis is to develop a self-powered Structural Health Monitoring (SHM) system for aeronautical applications. This system has to be fully autonomous and has to be able to carry out SHM tasks such as damage detection and location. The energetic autonomy of the system is provided by a vibrational energy harvesting technology using bonded SHM piezoelectric transducers. In this document,an analytical model of the energy harvesting process has been proposed. This model, validated by the Finite Element Method (FEM), allows the optimization of the energy harvesting system by determining the ideal type of transducers as well as their optimal dimensions and locations. Then, this model has been applied to a configuration aiming to be more representative of the in-flight vibrations experienced by a structure. Good agreement has been found between the analytical simulation and the experimental measurements. A power of 1.67mW has been harvested and the wideband capability of the transducers has been verified. Afterwards, the possibility of using the vibrational energy harvesting technology to control composite structures on assembly line has been investigated. For this case study, a transducer strategically located nearby an available power supply generates Lamb waves throughout the structure to tackle the absence of natural vibration. The remaining sensors, spread all over the structure, convertthe mechanical vibrations into electrical power. Using this technology, a power of 7.36mW has been harvested. Finally, this SHM system has also been able to detect a tool drop on the composite structure and to light simultaneously and autonomously a light-emitting diode (LED) simulating the consumption required to transmit the information wirelessly.

Nano scale processing of IC chips has become the prime production technique as the microelectronic industry aims towards scaling down product dimensions while increasing accuracy and performance. Accurate control of temperature and a good monitoring mechanism for thickness of the deposition layers during epitaxial growth are critical parameters influencing a good yield. The two-fold objective of this thesis is to establish the feasibility of an alternative to the current pyrometric and ellipsometric techniques to simultaneously measure temperature and thickness during wafer processing. TAP-NDE is a non-contact, non-invasive, laser-based ultrasound technique that is employed in this study to contemporarily profile the thermal and spatial characteristics of the wafer. The Gabor wavelet transform allows the wave dispersion to be unraveled and the group velocity of individual frequency components to be extracted from the experimentally acquired time waveform. The thesis illustrates the formulation of a theoretical model that is used to identify the frequencies sensitive to temperature and thickness changes. The group velocity of the corresponding frequency components is determined and their corresponding changes with respect to temperature for different thickness are analytically modeled. TAP-NDE is then used to perform an experimental analysis on Silicon wafers of different thickness to determine the maximum possible resolution of TAP-NDE towards temperature sensitivity, and to demonstrate the ability to differentiate between wafers of different deposition layer thickness at temperatures up to 600?C. Temperature resolution is demonstrated for ?10?C resolution and for ?5?C resolution; while thickness differentiation is carried out with wafers carrying 4000? and 8000? of aluminum deposition layer. The experimental group velocities of a set of selected frequency components extracted using the Gabor Wavelet time-frequency analysis as compared to their corresponding theoretical group velocities show satisfactory agreement. As a result of this work, it is seen that TAP-NDE is a suitable tool to identify and characterize thickness and temperature changes simultaneously during thermal annealing that can replace the current need for separate characterization of these two important parameters in semiconductor manufacturing.

This study investigates wave propagation in an elastic half-space with quadratic nonlinearity due to a line load on the surface. The consideration of this problem is one of the well known Lamb problems. Even since Lamb's original solution, numerous investigators have obtained solutions to many different variants of the Lamb problem. However, most of the solutions existing in the current literature are limited to wave propagation in a linear elastic half-space. In this work, the Lamb problem in an elastic half-space with quadratic nonlinearity is considered. For this, the problem is first formulated as a hyperbolic system of conservation laws, which is then solved numerically using a semi-discrete central scheme. The numerical method is implemented using the package CentPack. The accuracy of the numerical method is first studied by comparing the numerical solution with the analytical solution for a half-space with linear response (the original Lamb's problem). The numerical results for the half-space with quadratic nonlinearity are than studied using signal-processing tools such as the fast Fourier transform (FFT) in order to analyze and interpret any nonlinear effects. This in particular gives the possibility to evaluate the excitation of higher order harmonics whose amplitude is used to infer material properties. To quantify and compare the nonlinearity of different materials, two parameters are introduced; these parameters are similar to the acoustical nonlinearity parameter for plane waves.

Nano scale processing of IC chips has become the prime production technique as the microelectronic industry aims towards scaling down product dimensions while increasing accuracy and performance. Accurate control of temperature and a good monitoring mechanism for thickness of the deposition layers during epitaxial growth are critical parameters influencing a good yield. The two-fold objective of this thesis is to establish the feasibility of an alternative to the current pyrometric and ellipsometric techniques to simultaneously measure temperature and thickness during wafer processing. TAP-NDE is a non-contact, non-invasive, laser-based ultrasound technique that is employed in this study to contemporarily profile the thermal and spatial characteristics of the wafer. The Gabor wavelet transform allows the wave dispersion to be unraveled and the group velocity of individual frequency components to be extracted from the experimentally acquired time waveform. The thesis illustrates the formulation of a theoretical model that is used to identify the frequencies sensitive to temperature and thickness changes. The group velocity of the corresponding frequency components is determined and their corresponding changes with respect to temperature for different thickness are analytically modeled. TAP-NDE is then used to perform an experimental analysis on Silicon wafers of different thickness to determine the maximum possible resolution of TAP-NDE towards temperature sensitivity, and to demonstrate the ability to differentiate between wafers of different deposition layer thickness at temperatures up to 600?C. Temperature resolution is demonstrated for ?10?C resolution and for ?5?C resolution; while thickness differentiation is carried out with wafers carrying 4000? and 8000? of aluminum deposition layer. The experimental group velocities of a set of selected frequency components extracted using the Gabor Wavelet time-frequency analysis as compared to their corresponding theoretical group velocities show satisfactory agreement. As a result of this work, it is seen that TAP-NDE is a suitable tool to identify and characterize thickness and temperature changes simultaneously during thermal annealing that can replace the current need for separate characterization of these two important parameters in semiconductor manufacturing.

This research deals with the second harmonic generation of Lamb waves in nonlinear elastic, homogeneous, isotropic plates. These waves find current applications in the field of ultrasonic, nondestructive testing and evaluation of materials. The second harmonic Lamb wave generation is investigated analytically in order to provide information on suitable excitation modes maximizing the second harmonic amplitude. Using an existing solution for the problem of second harmonic generation in wave guides, the solution is explained for the plate and examined as to the symmetry properties of the second harmonic wave, since published results are contradictory. It is shown that the cross-modal generation of a symmetric secondary mode by an antisymmetric primary mode is possible. Modes showing internal resonance, whose conditions are nonzero power flux from the primary wave and phase velocity matching, are shown to be most useful for measurements. In addition, group velocity matching is required. A material-independent analysis of the linear Lamb mode theory provides mode types satisfying all three requirements. Using the example of an aluminum plate, the found internally resonant modes are evaluated with regard to the rate of second harmonic generation and practical issues such as excitability and ease of measurement. Pros and cons of each mode type are presented.

The recent development of the commercially viable thin film electro-acoustic technology has triggered a growing interest in the research of plate guided wave or Lamb wave components owing to their unique characteristics. In the present thesis i) an experimental study of the thin film plate resonators (FPAR) performance operating on the lowest symmetrical Lamb wave (S0) propagating in highly textured AlN membranes versus a variety of design parameters has been performed. The S0 mode is excited through an Interdigital Transducer and confined within the structure by means of reflection from metal strip gratings. Devices operating in the vicinity of the stop-band center exhibiting a Q-value of up to 3000 at a frequency around 900MHz have been demonstrated. Temperature compensation of this type of devices has been studied theoretically and successfully realized experimentally for the first time. Further, integrated circuit-compatible S0 Lamb based two-port FPAR stabilized oscillators exhibiting phase noise of -92 dBc/Hz at 1 kHz frequency offset with feasible thermal noise floor below -180 dBc/Hz have been tested under high power for a couple of weeks. More specifically, the FPARs under test have been running without any performance degradation at up to 27 dBm loop power. Further, the S0 mode was experimentally demonstrated to be highly mass and pressure sensitive as well as suitable for in-liquid operation, which together with low phase noise and high Q makes it very suitable for sensor applications; ii) research in view of FPARs operating on other types of Lamb waves as well as novel operation principles has been initiated. In this work, first results on the design, fabrication and characterization of two novel type resonators: The Zero Group Velocity Resonators (ZGVR) and The Intermode-Coupled Thin Film Plate Acoustic Resonators (IC-FPAR), exploiting new principles of operation have been successfully demonstrated. The former exploits the intrinsic zero group velocity feature of the S1 Lamb mode for certain combination of design parameters while the latter takes advantage of the intermode interaction (involving scattering) between S0 and A1 Lamb modes through specially designed metal strip gratings (couplers). Thus both type of resonators operate on principles of confining energy under IDT other than reflection.

Orientador: Eurípedes Guilherme de Oliveira Nóbrega / Tese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecânica / Made available in DSpace on 2018-08-23T01:49:32Z (GMT). No. of bitstreams: 1 Souza_PabloRodrigode_D.pdf: 10455045 bytes, checksum: b8461069008fc0a12ec07525f9bd8d2e (MD5) Previous issue date: 2013 / Resumo: O resumo poderá ser visualizado no texto completo da tese digital / Abstract: The abstract is available with the full electronic document / Doutorado / Mecanica dos Sólidos e Projeto Mecanico / Doutor em Engenharia Mecânica