Les microcantileviers fonctionnalisés offrent une plateforme idéale pour la nano- et micro-mécanique et pour le développement de (bio-) capteurs tres sensible. Le principe d’opération consiste dans des évènements physicochimiques qui se passent du côté fonctionnalisé du microcantilevier induisant une différence de stress de surface entre les deux côtés du cantilevier qui cause une déflexion verticale du levier. Par contre, les facteurs et les phénomènes interfacials qui régissent la nature et l'intensité du stress de surface sont encore méconnus. Pour éclaircir ce phénomène, la première partie de cette thèse porte sur l'étude des réactions de microcantileviers qui sont recouverts d'or et fonctionnalisés par une monocouche auto-assemblée (MAA) électroactive. La formation d'une MAA de ferrocènylundécanethiol (FcC11SH) à la surface d'or d'un microcantilevier est le modèle utilisé pour mieux comprendre le stress de surface induit par l’électrochimie. Les résultats obtenus démontrent qu'une transformation rédox de la MAA de FcC11SH crée un stress de surface qui résulte dans une déflexion verticale du microcantilevier. Dépendamment de la flexibilité du microcantilevier, cette déflexion peut varier de quelques nanomètres à quelques micromètres. L’oxydation de cette MAA de FcC11SH dans un environnement d'ions perchlorate génère un changement de stress de surface compressive. Les résultats indiquent que la déflexion du microcantilevier est due à une tension latérale provenant d'une réorientation et d'une expansion moléculaire lors du transfért de charge et de pairage d’anions. Pour vérifier cette hypothèse, les mêmes expériences ont été répéteés avec des microcantileviers qui ont été couverts d'une MAA mixte, où les groupements électroactifs de ferrocène sont isolés par des alkylthiols inactifs. Lorsqu’un potentiel est appliqué, un courant est détecté mais le microcantilevier ne signale aucune déflexion. Ces résultats confirment que la déflexion du microcantilevier est due à une pression latérale provenant du ferrocènium qui se réorganise et qui crée une pression sur ses pairs avoisinants plutôt que du couplage d’anions. L’amplitude de la déflexion verticale du microcantilevier dépend de la structure moléculaire de la MAA et du le type d’anion utilisés lors de la réaction électrochimique. Dans la prochaine partie de la thèse, l’électrochimie et la spectroscopie de résonance de plasmon en surface ont été combinées pour arriver à une description de l’adsorption et de l’agrégation des n-alkyl sulfates à l’interface FcC11SAu/électrolyte. À toutes les concentrations de solution, les molécules d'agent tensio-actif sont empilées perpendiculairement à la surface d'électrode sous forme de monocouche condensé entrecroisé. Cependant, la densité du film spécifiquement adsorbé s'est avérée être affectée par l'état d'organisation des agents tensio-actifs en solution. À faible concentration, où les molécules d'agent tensio-actif sont présentes en tant que monomères solvatés, les monomères peuvent facilement s'adapter à l’évolution de la concentration en surface du ferrocènium lors du balayage du potential. Cependant, lorsque les molécules sont présentes en solution en tant que micelles une densité plus faible d'agent tensio-actif a été trouvée en raison de l'incapacité de répondre effectivement à la surface de ferrocenium générée dynamiquement. / Surface-functionalized microcantilevers provide an ideal platform for nano- and micro-mechanical actuation and highly sensitive sensing technologies. The basic principle of operation is that a chemical or physical event occurring at the functionalized surface of one side of the cantilever generates a surface stress difference (between the active functionalized and passive non-functionalized sides) that causes the cantilever to bend away from its resting position. However, the factors and phenomena contributing to both the nature and magnitude of the surface stress are not well understood. To this end, the first part of this thesis focused on investigating the potential-controlled actuation and surface stress properties of free-standing gold-coated microcantilevers functionalized with a redox-active self-assembled monolayer (SAM). A ferrocenylundecanethiolate (FcC11SAu) SAM on a gold-coated cantilever was used as a model system to investigate the surface stress generated by faradaic chemistry. The data obtained clearly demonstrates that the electrochemical transformation of a ferrocene moiety in a monomolecular organic film can generate a surface stress change of sufficient magnitude to deflect a microcantilever. In fact, depending on the flexibility of the microcantilever, the mechanical deflection resulting from the redox transformation of the surface-tethered ferrocene can range on the order of nanometers to micrometers. The oxidation of the FcC11SAu SAM in perchlorate electrolyte generates a compressive surface stress change. The microcantilever deflection is driven by the lateral tension resulting from molecular reorientation/volume expansion accompanying the charge-transfer and ion-pairing events. To verify this hypothesis, mixed SAM-modified microcantilevers, in which the electroactive ferrocenes are isolated from one another by an inert n-alkylthiolate matrix, were investigated. Under an applied potential, a Faradaic current was measured, but no microcantilever beam deflection was observed. This finding confirms that the cantilever responds to the lateral pressure exerted by an ensemble of re-orienting ferrocenium-bearing alkylthiolates upon each other rather than to individual anion pairing events. Changes in molecular structure and anion type can also be used to modulate the extent of micromechanical motion. In the next part of the dissertation, electrochemical measurements and surface plasmon resonance spectroscopy were combined to present a description of the adsorption and aggregation of n-alkyl sulfates at the FcC11SAu/electrolyte interface. At all bulk solution concentrations, the surfactant moieties packed perpendicular to the electrode surface in the form of an interdigitated condensed film. However, the density of the specifically adsorbed film was found to be affected by the organizational state of the surfactants in solution. At low concentrations, where the surfactant molecules are present as solvated monomers, the monomers can readily adapt to the changing ferrocenium concentration with the potential potential scan. However, when the molecules are present as micellar structures in solution, a lower surfactant packing density was found because of the inability to respond effectively to the dynamically generated surface ferroceniums. This research demonstrates the potential utility of charge-transfer interactions for organizing materials at solid interfaces and effecting micromechanical actuation using an electrifical stimulus.

Microelectromechanical systems (MEMS) depend on mechanical deformation to sense their environment, enhance electrical circuitry, or store data. Nonlinear forces arising from multiphysics phenomena at the micro- and nanoscale -- van der Waals forces, electrostatic fields, dielectric charging, capillary forces, surface roughness, asperity interactions -- lead to challenging problems for analysis, simulation, and measurement of the deforming device elements. Herein, a foundation for the study of mechanical deformation is provided through computational and experimental studies of MEMS microcantilever capacitive switches. Numerical techniques are built to capture deformation equilibria expediently. A compact analytical model is developed from principle multiphysics governing operation. Experimental measurements support the phenomena predicted by the analytical model, and finite element method (FEM) simulations confirm device-specific performance. Altogether, the static multistability and quasistatic performance of the electrostatically-actuated switches are confirmed across analysis, simulation, and experimentation. <p><br></p> <p>The nonlinear multiphysics forces present in the devices are critical to the switching behavior exploited for novel applications, but are also a culprit in a common failure mode when the attractive forces overcome the restorative and repulsive forces to result in two elements sticking together. Quasistatic operation is functional for switching between multistable states during normal conditions, but is insufficient under such stiction-failure. Exploration of dynamic methods for stiction release is often the only option for many system configurations. But how and when is release achieved? To investigate the fundamental mechanism of dynamic release, an atomic force microscopy (AFM) system -- a microcantilever with a motion-controlled base and a single-asperity probe tip, measured and actuated via lasers -- is configured to replicate elements of a stiction-failed MEMS device. Through this surrogate, observable dynamic signatures of microcantilever deflection indicate the onset of detachment between the probe and a sample.</p>

Nanotechnology is expected to play a major role in many technology areas including electronics, materials, and defense. One of the most popular tools for nanoscale surface analysis is the atomic force microscope (AFM). AFM can be used for surface manipulation along with surface imaging. The primary motivation for this research is to demonstrate AFM-based lithography on thin films using cantilevers with integrated heaters. These thermal cantilevers can control the temperature at the end of the tip, and hence they can be used for local in-situ thermal analysis. This research directly addresses applications like nanoscale electrical circuit fabrication/repair and thermal analysis of thin-films. In this study, an investigation was performed on two thin-film materials. One of them is co-polycarbonate, a variant of a polymer named polycarbonate, and the other is an energetic material called pentaerythritol tetranitrate (PETN). Experimental methods involved in the lithography process are discussed, and the results of lithographic experiments performed on co-polycarbonate and PETN are reported. Effects of dominant parameters during lithography experiments like time, temperature, and force are investigated. Results of simulation of the interface temperature between thermal cantilever tip and thin film surface, at the beginning of the lithography process, are also reported.