No description available.

This thesis presents the design and fabrication of coplanar waveguide to microstrip transitions and planar spiral inductors, and the design of metal-insulator-metal capacitors, a planar band-pass, and a low-pass filter structures as an application for the inductors and capacitors using the RF MEMS technology. This thesis also includes a packaging method for RF MEMS devices with the use of benzocyclobutene as bonding material. The transition structures are formed by four different methods between coplanar waveguide end and microstrip end, and they are analyzed in 1-20 GHz. Very low loss transitions are obtained by maintaining constant characteristic impedance which is the same as the port impedance through the transition structures. The planar inductors are formed by square microstrip spirals on a glass substrate. Using the self-inductance propery of a conductive strip and the mutual inductance between two conductor strips in a proper arrangement, the inductance value of each structure is defined. Inductors from 0.7 nH up to 20 nH have been designed and fabricated. The metal-insulator-metal capacitors are formed by two coplanar waveguide structures. In the intersection, one end of a coplanar waveguide is placed on top of the end of the other coplanar waveguide with a dielectric layer in between. Using the theory of parallel plate capacitors, the capacitance of each structure is adjusted by the dimensions of the coplanar waveguides, which obviously adjust the area of intersection. Capacitors from 0.3 pF up to 9.8 pF have been designed. A low-pass filter and a band-pass filter are designed using the capacitors and inductors developed in this thesis. In addition to lumped elements, the interconnecting transmission lines, junctions and input-output lines are added to filter topologies. The RF MEMS packaging is realized on a coplanar waveguide structure which stands on a silicon wafer and encapsulated by a silicon wafer. The capping chip stands on the BCB outer ring which promotes adhesion and provides semi hermeticity. Keywords: Transition between transmission lines, planar spiral inductor, metal-insulator-metal capacitor, RF MEMS packaging, surface micromachining.

This thesis presents distributed MEMS transmission line (DMTL) phase shifters, emphasizing the circuit modeling and design as well as the performance improvement. A novel modeling methodology is introduced for DMTL unit sections, with bridge widths larger than 50 &amp / #956 / m. The introduced model is compared with EM simulation results and the CLR modeling results. For structures with bridge widths larger than 50 &amp / #956 / m, the introduced model fits the simulation results much better than the CLR model. The simulated structures are fabricated in METU micro-electronics facilities on glass substrates using gold structural layers. 1-20 GHz S-parameter measurement results of various DMTL structures are compared with the introduced model. It is observed that the S-parameters match except for a scaling need in the insertion loss. The measurement results give 2 dB insertion and 15 dB isolation at 20 GHz. The ABCD parameters of the introduced model are converted into S-parameters. Loss and the phase shift of the DMTL structures are expressed in terms of these S-parameters. These expressions are re-written as MATLAB code, from which the phase shift/loss (degree/dB) performance is evaluated. Therefore degree/dB plots with respect to bridge widths and center CPW conductor widths are obtained. From these plots the optimum DMTL phase shifters, which give maximum phase shift for minimum loss are determined for a pre-defined DMTL structure. To increase the degree/dB performance of a DMTL phase shifter, a change in the geometry of the DMTL phase shifters is proposed. The geometry change is based on inserting an open-ended stub through the signal line and connecting one side of the stub to the bridge. By this way, the stub capacitance is added to the shunt capacitance of the bridge satisfying a larger phase shift. The simulations point out a performance of 217 degree/dB at 20 GHz with a 15 % change in the 25 &amp / #956 / m wide bridge height ratio.

This thesis reports development of three different high performance, low g-sensitive micromachined gyroscopes having single, double, and quadruple masses. The single mass gyroscope (SMG) is developed for comparison of its performance with the double mass gyroscope (DMG) and quadruple mass gyroscope (QMG). DMG is a tuning fork gyroscope, diminishing the effects of unpredictable g-loadings during regular operation, while QMG is a twin tuning fork gyroscope, developed for a uniform and minimized g-sensitivity. DMG and QMG use novel ring spring connections for merging the masses in drive modes, providing uniform and anti-phase drive mode vibrations that minimize the cross-coupling and the effects of intrinsic and extrinsic accelerations on the scale factor and bias levels of the gyroscopes. The sense mode of each mass of the multi-mass gyroscopes is designed to have higher resonance frequencies than that of the drive mode for possible matching requirements, and these sense modes have dedicated frequency tuning electrodes for frequency matching or tuning. Detailed performance simulations are performed with a very sophisticated computer model using the ARCHITECT software. These gyroscopes are fabricated using a standard SOIMUMPs process of MEMSCAP Inc., which provides capacitive gaps of 2 &micro / m and structural layer thickness of 25 &micro / m. Die sizes of the fabricated gyroscope chips are 4.1 mm x 4.1 mm for the single mass, 4.1 mm x 8.9 mm for the double mass, and 8.9 mm x 8.9 mm for the quadruple mass gyroscope. Fabricated gyroscopes are tested with dedicated differential readout electronics constructed with discrete components. Drive mode resonance frequencies of these gyroscopes are in a range of 3.4 kHz to 5.1 kHz. Depending on the drive mode mechanics, the drive mode quality (Q) factors of the fabricated gyroscopes are about 300 at atmospheric pressure and reaches to a value of 2500 at a vacuum ambient of 50 mTorr. Resolvable rates of the fabricated gyroscopes at atmospheric pressure are measured to be 0.109 deg/sec, 0.055 deg/sec, and 1.80 deg/sec for SMG, DMG, and QMG, respectively. At vacuum, the respective resolutions of these gyroscopes improve significantly, reaching to 106 deg/hr with the SMG and 780 deg/hr with the QMG, even though discrete readout electronics are used. Acceleration sensitivity measurements at atmosphere reveal that QMG has the lowest bias g-sensitivity and the scale factor g sensitivity of 1.02deg/sec/g and 1.59(mV/(deg/sec))/g, respectively. The performance levels of these multi-mass gyroscopes can be even further improved with high performance integrated capacitive readout electronics and precise sense mode phase matching.

Micromachined gyroscopes are attractive replacements to conventional macro-mechanical and optical gyroscopes due to their small size, low power and low cost. The application domain of these devices is quickly expanding from automotive to aerospace and consumer electronics industries. As potential high volume consumer applications for micromachined gyroscopes continue to emerge, design and manufacturing techniques that improve their performance, shock survivability and reliability without driving up the cost and size become important. Today, state-of-the-art micromachined gyroscopes can achieve high performance with low frequency operation (3-30kHz) but at the cost of large form factor, large operating voltages and high vacuum packaging. At the same time, most consumer applications require gyroscopes with fast response time and high shock survivability, which are generally unavailable in low frequency gyroscopes. As a result, innovative designs and fabrication technologies that will offer more practical gyroscopes are desired. In this dissertation, capacitive bulk acoustic wave (BAW) silicon disk gyroscopes are introduced as a new class of micromachined gyroscope to investigate the operation of Coriolis-based vibratory gyroscopes at high frequency and further meet consumer electronics market demands. Capacitive BAW gyroscopes, operating in the frequency range of 1-10MHz are stationary devices with vibration amplitudes less than 20nm, resulting in high device bandwidth and high shock tolerance. They require low operating voltages, which simplifies the interface circuit design and implementation in standard CMOS technologies. They also demonstrate appropriate thermally stable performance in air, which eliminates the need both for vacuum packaging and for temperature control. A revised high aspect ratio poly- and single crystal silicon (HARPSS) process was utilized to implement these devices in thick SOI substrates with very small capacitive gap sizes (~200 nm). The prototype devices show ultra-high quality factors (Q>200,000) and large bandwidth of 15-30Hz. In addition, the design and implementation of BAW disk gyroscopes are optimized for self-matched mode operation. Operating a vibratory gyroscope in matched mode is a straightforward way to improve performance parameters but, is challenging to achieve without applying large voltages. In this work, self-matched mode operation was provided by enhanced design of the perforations of the disk structure. Furthermore, a multi-axis BAW gyroscope, an extension of the z-axis, is developed. This novel approach avoids the issues associated with integrating multiple proof masses, permitting a very small form factor. The multi-axis gyroscopes operate in out-of plane and in-plane modes to measure the rotation rate around the x- and z-axes. These gyroscopes were also optimized to achieve self-matched mode operation in their both modes.

This research discusses the design, fabrication, integration, and characterization of micromachined millimeter-wave components and a signal source for THz multiplier source using the deep reactive ion etching technique. A wide range of advanced micromachined millimeter-wave components are proposed and fully validated with the measurement. These micromachined millimeter-wave passives include: the W-band straight and meander waveguides, W-band three-pole filter, waveguide hybrid and power divider, a novel CPW-to-waveguide transition and filter, and a novel cavity resonator for 60-GHz reconfigurable applications. The proposed THz multiplier source is a broadband 900-GHz silicon micromachined two-anode frequency tripler with the state-of-the-art performance. The research results enable the silicon micromachining technique to build low-loss and low-cost millimeter-wave components and THz signal sources.

No description available.

This research studies microdrilling of biocompatible materials including commercially pure titanium, 316L stainless steel, polyether ether ketone (PEEK) and aluminum 6061-T6. A microdrilling technique that uses progressive pecking and micromist coolant is developed that allows drilling of 127 micrometers diameter microholes with an aspect ratio of 10:1. The drilling parameters, dominant wear pattern, hole positioning accuracy and effect of AlTiN tool coating are experimentally determined. The experimental data trend agrees with classical Taylor's machining equation. Despite of fragile and long microdrills, the progressive pecking cycle and micromist allowed deep hole drilling on all the tested materials. Drill wear is more pronounced at outer cutting edge due to higher cutting speeds. However, when drilling 316L stainless steel attrition wear at chisel edge is dominant. Hole quality degradation due to formation of built up edge at the drill tip is observed. Coated drill improves tool life by 122% and enhances hole quality when drilling 316L stainless steel. The hole positioning accuracy is improved by 115% and total hole diameter variation decreased from 0.11% to 0.003% per mm of drilling distance.

This dissertation presents the development of electrically-powered, lamination-based microactuators for the realization of large arrays of high impulse and short duration micro-jets with potential applications in the field of micro-electro-mechanical systems (MEMS). Microactuators offer unique control opportunities by converting the input electrical or chemical energy stored in a propellant into useful mechanical energy. This small and precise control obtained can potentially be applied towards aerodynamic control and transdermal drug delivery applications. This thesis discusses the development of both chemical and physical microactuators and characterizes their performance with focus towards the feasibility of using them for a specific application. The development of electrically powered microactuators starts by fabricating an array of radially firing microactuators using lamination-based micro fabrication techniques that potentially enable batch fabrication at low cost. The microactuators developed in this thesis consist of three main parts: a micro chamber in which the propellant is stored; two electrode structures through which electrical energy is supplied to the propellant; and a micro nozzle through which the propellant or released gases from the propellant are expanded as a jet. The fabricated actuators are then integrated with MEMS-process-compatible propellants and optimized to produce rapid ignition of the propellant and generate a fluidic jet. This rapid ignition is achieved either by making the propellant itself conductive, thus, passing an electric current directly through the propellant; or by discharging an arc across the propellant by placing it between two closely spaced electrodes. The first concept is demonstrated with chemical microactuators for the application of projectile maneuvering and the second concept is demonstrated with physical microactuators for transdermal drug delivery application. For both the actuators, the propellant integrated microactuators are characterized for performance in terms of impulse delivered, thrust generated and duration of the jet. The experimentally achieved results are validated by comparing with results from theoretical modeling. Finally, the feasibility of using chemical microactuators for maneuvering the path of a 25 mm projectile spinning at 500 Hz is discussed and the feasibility of applying the physical microactuators for increasing skin's permeability to drug analog molecules is studied.

Le développement actuel de la technologie induit une constante nécessité d’obtenir des tailles de plus en plus petites pouvant descendre jusqu’à des dimensions micrométriques et sub -micrométriques. L’ablation laser, qui a le grand avantage d’un enlèvement de matière très précis, est un candidat prometteur. Dans cette thèse on démontre la faisabilité de tirer avantage des impulsions laser femtosecondes avec la matière pour la micro et nano structuration, et ceci en ayant développé une machine compacte de grande précision et flexibilité. Une approche théorique comparant les régimes d’interaction à haute et basse cadence est présentée. Des investigations de l’efficacité du temps de procédé aussi bien que l’effet de la cadence pendant l’ablation de métaux ont été effectuées. Le potentiel de l’outil multifonctionnel couplé avec un oscillateur laser femtoseconde à haute cadence est montré pour différentes applications en biotechnologie. Les résultats sur la cartographie d’une large zone aussi bien que la nano découpe de précision de tissus biologiques et de matériaux variés sont présentés. Cet outil polyvalent couvre de larges domaines de recherche de la nano découpe d’échantillons biologiques aussi bien que la nanostructuration de différents types de matériaux. C’est d’un grand intérêt pour de nombreuses applications en science des matériaux, nanobiotechnologie et nanomédecine / The current development of technology makes constant the necessity of getting smaller and smaller features sizes down to micrometer and sub micrometer scales. Laser ablation, which has the great advantage of precise material removal, is a promising candidate. In this dissertation we have demonstrated the feasibility to take advantage of the interaction of femtosecond laser pulses with matter for micro- and nano-structuration and this by having developed a compact and high accurate and flexible apparatus. An analyse of the specific physical mechanisms of laser-matter interaction in the femtosecond regime is presented. Investigations on processing time efficiency as well as the effect of the repetition rate during ablation of metals have been performed. The potential of the multifunctional tool coupled with a compact high repetition rate femtosecond oscillator is shown for different applications in biotechnology. Results on large area mapping as well as accurate nanoprocessing of biological tissue and various materials are presented. This versatile tool covers wide research fields from the nanoprocessing of biological samples as well as the nanostructuring of different type of materials. It is of great interest for many applications in material science, nanobiotechnology and nanomedicine