In this thesis the in-plane pattern distortion resulting from the use of Evanescent Near Field Optical Lithography (ENFOL) masks was investigated. ENFOL is a high resolution low-cost technique of lithography that is able to pattern features beyond the diffraction limit of light. Due to its use of the evanescent near field, ENFOL requires the use of conformable masks for intimate contact. Such masks can stretch and skew as they come into contact with silicon substrates and therefore distort the high resolution features patterned on them. It was desired to measure this distortion to ascertain the patterning performance of ENFOL masks and possibly correct for any uniform distortion found. To this end a sophisticated measuring process was successfully demonstrated. This involved the use of a Raith 150 Electron Beam Lithography (EBL) system with precision laser interferometer stage and metrology software module for automated measurements. Custom software was written for the Raith to enable it to take additional measurements to compensate for electron beam drift. Processing algorithms were then employed to using the measurements to compensate for beam drift and correcting for shift and rotation systematic errors. The performance of the in-plane distortion measuring process was found to have a precision of 60nm. With the ability to measure distortion, ENFOL masks were used to pattern substrates and distortion was found to be large, on the order of 1µm. This is much larger than desired for sub 100nm patterning as is expected of ENFOL. The distortions were non-uniform patterns of localised displacements. This, the observation of Newton's rings beneath a test mask and the observation of a single particle distortion across measurements of the same mask across different loadings in the EBL pointed to particulate contamination causing the distortion. In order to prove beyond doubt that particulate contamination was the cause of the spurious distortions, mechanical modelling using the Finite Element Method (FEM) of analysis was employed. The results from this matched the distortions observed experimentally, particles 20-40µm modelling the observed distortion.

Acoustical-based imaging techniques have found merit in determining the behavior of vibrating structures. These techniques are commonly used in numerous applications to obtain detailed noise source information and energy distributions on source surfaces. This thesis focuses on the continued development of the nearfield acoustic holography (NAH) approach. Conventional NAH consists of first capturing pressure data on a two-dimensional conformal measurement contour in the nearfield of the radiating source. These data are then propagated back to the vibrating structure to obtain the normal velocity profile on the source surface. With the source surface velocity profile known, the acoustic pressure, particle velocity, and intensity generated by the source can be reconstructed anywhere in space. The precision of source reconstruction is reliant upon accurate measurement of the pressure field at the hologram surface. For complex acoustic fields this requires fine spatial resolution and therefore demands large microphone arrays. In this thesis, a technique is developed for performing NAH using energy-based measurements. Recent advancements in the area of acoustic sensing technology have made particle velocity field information more readily available. Because energy-based measurements provide directional information about the field, a more accurate measurement of the pressure field is obtained. It is proposed that an energy-based system will significantly reduce the number of measurements required to perform NAH without sacrificing accuracy. Significantly reducing the number of measurements required to perform NAH will reduce the time, and therefore the expense, of using NAH as an analysis tool. Many potential applications exist for an improved NAH measurement method in the automobile and aerospace industries. These industries provide numerous large-scale applications where employing time-consuming scanning methods is not cost-effective. This is especially the case for airplane in-flight passenger noise tests, where the expense of operating the airplane is extremely high. Therefore, even a small savings in data acquisition time would be very beneficial.

Acoustical-based imaging systems have found merit in determining the behavior of vibrating structures. This thesis focuses on the continued development of the nearfield acoustic holography (NAH) approach. Conventional NAH consists of first measuring the pressure field on a two-dimensional conformal surface and then propagating this data back to the vibrating structure to obtain information about the source, such as the normal velocity distribution. Recent work has been done which incorporates particle velocity information into the traditional NAH measurements to reduce the number of measurements required. This advancement has made NAH a more affordable tool for acoustical imaging and sound field characterization. It is proposed that the inclusion of velocity information into traditional NAH can further increase its usefulness. By propagating the velocity and pressure values independently and recombining them on the reconstruction surface, the pressure field and energy density fields can be predicted at any point in the sound field. It is also proposed that the same NAH measurement can be used to predict farfield directivity. The inclusion of velocity values into the NAH technique also provides a means for predicting energy density (ED) anywhere within the acoustic field. These two developments would allow a single NAH measurement to provide much more information about an acoustic source and its radiated sound field. Experimental testing shows that NAH is successful at predicting the shape of the resulting ED field and directivity pattern with some error in amplitude. The best performance of the technique is with a planer source resulting in an average amplitude error of 18.5% over the entire field.

Achieving acceptable plane wave uniformity throughout an expanded volume is necessary to conduct scattering measurements on a large target in a controlled environment. An expanded volume is large relative to the size of the nearfield array configuration used to produce plane wave uniformity. The optimum set of shading coefficients for a nearfield array may not produce acceptable plane wave uniformity as the volume and frequency domain are expanded for a given array configuration. Choosing the frequency domain as a single frequency for an optimum set of coefficients will produce plane wave uniformity throughout the largest possible volume for a given array configuration. This study determines the acceptability of uniformity results produced by an optimum set of frequency dependent coefficients throughout an expanded volume for two array configurations that comprise a system for measuring bistatic target strength in the nearfield. Minimizing the frequency domain chosen for an optimum set of coefficients will produce plane wave uniformity for the largest possible volume for a given array configuration. This study determines the acceptability of uniformity results produced by an optimum set of frequency dependent coefficients throughout an optimistic volume for two array configurations that comprise a bi-static array.

This thesis considers the design of a beamformer which can enhance desired signals in an environment consisting of broadband nearfield and/or farfield sources. The thesis contains: a formulation of a set of analysis tools which can provide insight into the intrinsic structure of array processing problems; a methodology for nearfield beamforming; theory and design of a general broadband beamformer; and a consideration of a coherent nearfield broadband adaptive beamforming problem. To a lesser extent, the source localization problem and background noise modeling are also treated. ¶: A set of analysis tools called modal analysis techniques which can be used to a solve wider class of array signal processing problems, is first formulated. The solution to the classical wave equation is studied in detail and exploited in order to develop these techniques. ¶: Three novel methods of designing a beamformer having a desired nearfield broadband beampattern are presented. The first method uses the modal analysis techniques to transform the desired nearfield beampattern to an equivalent farfield beampattern. A farfield beamformer is then designed for a transformed farfield beampattern which, if achieved, gives the desired nearfield pattern exactly. The second method establishes an asymptotic equivalence, up to complex conjugation, of two problems: (i) determining the nearfield performance of a farfield beampattern specification, and (ii) determining the equivalent farfield beampattern corresponding to a nearfield beampattern specification. Using this reciprocity relationship a computationally simple nearfield beamforming procedure is developed. The third method uses the modal analysis techniques to find a linear transformation between the array weights required to have the desired beampattern for farfield and nearfield, respectively. ¶: An efficient parameterization for the general broadband beamforming problem is introduced with a single parameter to focus the beamformer to a desired operating radius and another set of parameters to control the actual broadband beampattern shape. This parameterization is derived using the modal analysis techniques and the concept of the theoretical continuous aperture. ¶: A design of an adaptive beamformer to operate in a signal environment consisting of broadband nearfield sources, where some of interfering signals may be correlated with desired signal is also considered. Application of modal analysis techniques to noise modeling and broadband coherent source localization conclude the thesis.

In many engineering applications, including radar, sonar, communications and seismology, the direction of impinging signal wavefronts can be used to discriminate between competing sources. Often these source signals cover a wide bandwidth and conventional narrowband beamforming techniques are ineffective, since spatial resolution varies significantly across the band. In this thesis we consider the problem of beamforming for broadband signals, primarily when the spatial response remains constant as a function of frequency. This is called a frequency invariant beamformer (FIB).¶ Rather than applying the numerical technique of multi-parameter optimisation to solve for the beamformer parameters, we attempt to address the fundamental nature of the FIB problem. The general philosophy is to use a theoretical continuous sensor to derive relationships between a desired FI beampattern and the required signal processing structure. Beamforming using an array of discrete sensors can then be formulated as an approximation problem. This approach reveals a natural structure to the FIB which is otherwise buried in a numerical optimisation procedure.¶ Measured results from a microphone array are presented to verify that the simple FIB structure can be successfully implemented. We then consider imposing broadband pattern nulls in the FI beampattern, and show that (i) it is possible to impose an exact null which is present over all frequencies, and (ii) it is possible to calculate a priori how many constraints are required to achieve a null of a given depth in a FIB. We also show that the FIB can be applied to the problem of broadband direction of arrival (DOA) estimation and provides computational advantages over other broadband DOA estimators.¶ Through the theoretical continuous sensor approach, we show that the FIB theory can be generalised to the problem of designing a general broadband beamformer (GBB) which realizes a broadband angle-versus-frequency beampattern specification. Coupled with a technique for radial beampattern transformation, the GBB can be applied to a wide class of problems covering both nearfield beamforming (in which the shape of the impinging wavefront must be considered and farfield beamforming (which is simplified by the assumption of planar wavefronts) for a broadband beampattern specified over both angle and frequency.

Orientador: Jose Maria Campos dos Santos / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-07-25T04:25:40Z (GMT). No. of bitstreams: 1 Colinas_NiltonGilber_M.pdf: 6668829 bytes, checksum: 0f5fe00364a351d5d5859c9c042c161c (MD5) Previous issue date: 1999 / Resumo: Neste trabalho procurou-se explorar a técnica de Holografia Acústica de Campo Próximo (Nearfield Acoustic Holography - NAB), que tem se mostrado como uma forma de análise para problemas vibroacústicos. A holografia é um processo que permite determinar as características de um campo de ondas acústicas usando a Transformada de Fourier Discreta (Discrete Fourier Transform - DFT), a partir de uma grade de pontos de medições regularmente espaçados obtidos em um ambiente acústico onde a função de Green é conhecida. O presente trabalho apresenta uma breve revisão dos princípios desta técnica com uma aplicação na reconstrução de propriedades vibroacústicas de estruturas. O campo de pressão, campo de velocidade das partículas e intensidade acústica gerados por um elemento estrutural vibrante foram as grandezas reconstruídas através da técnica NAH em diferentes posições do espaço. A fim de minimizar os problemas de leakage oriundos do processamento dos sinais, a Série de Fourier Discreta Regressiva (Regressive Discrete Fourier Series - RDFS) foi utilizada como alternativa às técnicas de janelamento do sinal. Resultados obtidos para uma estrutura do tipo placa são analisados, validados e comparados com previsões teóricas / Abstract: In this work, the Nearfield Acoustic Holography technique - NAH was explored as an way to analyze vibroacoustic problems. Holography is a process that allows to determine acoustic fields characteristics using a Discrete Fourier Transform - DFT, from a regular grid of measurements obtained in an acoustic environment for which the Green' s function is known. This work presents a brief principle's review of this technique with an application on the reconstruction of the vibroacoustic properties of structures. The pressure field, particle velocity field and acoustical intensity generated by a vibrating structural element were reconstructed through the NAH technique in different spatial positions. ln order to minimize spatial leakage problems from signal processing a Regressive Discrete Fourier Series ¿ RDFS was utilized as an alternative to windowing techniques. Results obtained from a plate type structure were analyzed, validated and compared with theoretical predictions / Mestrado / Mecanica dos Solidos / Mestre em Engenharia Mecânica

No description available.

Orientador: Prof. Dr. Mário Minami / Dissertação (mestrado) - Universidade Federal do ABC, Programa de Pós-Graduação em Engenharia da Informação, 2014. / Determinar as características de um objeto é essencial para conhecê-lo e pode ser útil para colocá-lo em um sistema de classificação. Este trabalho pretendeu investigar as frequências naturais de moedas nacionais - as quais, do ponto de vista estritamente físico, tratam-se de discos metálicos- com o auxílio das ferramentas de Processamento Digital de Sinal. O método utilizado consistiu em excitar moedas fixas de modo a fazê-las vibrar segundo suas frequências naturais. Da teoria de Vibração de Discos, as propriedades acústicas de tais discos se relacionam com suas propriedades físicas, com o material de que tais discos são compostos e com as condições de contorno de suas partes componentes. Moedas, mesmo de geometria semelhante, mas feitas de diferentes materiais apresentam conjuntos diferentes de frequências naturais. Assim, moedas de um real fabricadas antes de 2002- quando se deu a mudança dos materiais empregados na cunhagem das moedas ¿ apresentam frequências nitididamente diferentes de uma moeda produzida a partir de então. Para atingir o objetivo proposto, utilizou-se aqui da técnica acústica de campo próximo. Dadas as pequenas dimensões do objeto, foi construído um array de microfones de capsulas de eletreto. O dispositivo foi responsável pela captação da vibração e por sua transdução para ondas sonoras. A caracterização acustica de moedas nacionais talvez possa ser útil no controle de seu processo de cunhagem e, também, para evitar fraudes. / The Determination of the characteristics of an object is essential to understand it and it can be helpful to build a system of classification. This work aims to investigate the natural frequencies of brazilian coins ¿ which are, from a purely physical standpoint,a kind of small plate metal- with the help of Digital Signal Processing tools. The method used was to excite clamped coins in order to make them vibrate according to their natural frequencies. According to the Vibration Theory, the acoustics properties of such plates are related to their physical properties, as well as with the material from which they are made of and the boundary conditions of its component parts. Coins even of similar geometry but made of different materials have different sets of natural frequencies. Thus, a real coin manufactured before 2002 - when there was a change of materials used in the minting of coins - has different set of frequencies from a coin produced since then. To achieve the goal that was proposed, we used here the acoustic near-field technique.Given the small size of the object, a microphones electret capsules array was built. They was responsible for the vibration capture and its transduction to the sound waves. The acoustic characterization of the national coins in circulation in Brazil, might be useful for controlling the process of minting and also to prevent frauds.

L’ Holographie acoustique de champ proche (NAH) est une méthode d’imagerie acoustique robuste, mais son application en écoulement peut être limitée par l’utilisation de mesures intrusives de pression ou de vitesse acoustique. Dans cette étude, une procédure holographique applicable en écoulement utilisant des mesures de vitesse non-intrusives est proposée. Cette méthode est basée sur le théorème intégral de Kirchhoff-Helmholtz convecté. La fonction de Green convectée est alors utilisée pour déterminer des propagateurs spatiaux convectés définis dans l’espace réel et incluant l’effet d’un écoulement subsonique uniforme. Les transformées de Fourier discrètes de ces propagateurs permettent alors d’évaluer les champs acoustiques à partir de la mesure du champ de pression ou de vitesse acoustique normale. Le but étant de développer une méthode de caractérisation de sources aéroacoustiques à partir de mesures de vitesse non-intrusives, cette étude se concentre essentiellement sur les propagateurs réels convectés basés sur la mesure de vitesse acoustique. Afin de valider cette procédure,des simulations ont été menées dans le cas de combinaisons de sources monopolaires et dipolaires convectées corrélées ou non. La procédure holographique développée donne de bons résultats par comparaison aux champs acoustiques théoriques. Une comparaison des résultats obtenus par les propagateurs convectés réels, développés dans cette thèse, avec ceux obtenus par leurs formes spectrales, développés par Kwon et al. fin 2010 pour des mesures de pression acoustique, montre l’intérêt d’utiliser la forme réelle pour la reconstruction de la pression acoustique à partir de la mesure de vitesse acoustique normale. L’efficacité de la procédure développée est confirmée par une campagne de mesure en soufflerie avec un haut-parleur affleurant rayonnant au sein d’un écoulement à Mach 0.22, et des mesures non-intrusives effectuées par Vélocimétrie Laser Doppler (LDV). Les champs de vitesse acoustique utilisés pour la procédure holographique sont dans ce cas extraits des mesures LDV par corrélation avec un microphone de référence. La faisabilité de prendre en compte des variations de l’écoulement dans la direction de reconstruction holographique est également vérifiée. / Nearfield Acoustic Holography (NAH) is a powerful acoustic imaging method but its application in flow can be limited by intrusive measurements of acoustic pressure or velocity. In this work, a moving fluid medium NAH procedure using non-intrusive velocity measurements is proposed. This method is based on the convective Kirchhoff-Helmholtz integral formula. The convective Green’s function is then used to derive convective realspace propagators including uniform subsonic airflow effects. Discrete Fourier transforms of these propagators allow then the assessment of acoustic fields from acoustic pressure or normal acoustic velocity measurements. As the aim is to derive an aeroacoustic sources characterisation method from non-inrusive velocity measurements, this study is especially focused on real convective velocity-based propagators. In order to validate this procedure, simulations in the case of combinations of monopolar and dipolar sources correlated or not, radiating invarious uniform subsonic flows, have been performed. NAH provides very favorable results when compared to the theoretical fields. A comparison of results obtained by real convective propagators, developed in this work, and those obtained by the spectral ones, developed by Kwon et al. at the end of 2010 for acoustic pressure measurements, shows the interest of using the real-form for NAH acoustic pressure reconstruction from normal acoustic velocity measurements. The efficiency of the developed procedure is confirmed by a wind tunnel campaign with a flush-mounted loudspeaker radiating in a flow at Mach 0.22 and non-intrusive Laser Doppler Velocimetry (LDV) measurements. Acoustic velocity fields used for the NAH procedure are in this case extracted from LDV measurements by correlation with a reference microphone. The feasibility of taking into account mean flow variations in the direction of NAH reconstruction is also checked.