No description available.

Thesis (Ph. D.)--Lehigh University, 2001. / Includes vita. Includes bibliographical references (leaves 200-206).

Thesis (Ph. D.)--Lehigh University, 2004. / Includes vita. Includes bibliographical references (leaves 184-195).

A nanomanipulation system operating inside a scanning electron microscope (SEM) enables visual observation and physical interactions with objects at the nanometer scale. Compared to SEM that is a powerful imaging platform (‘eyes’), the development of nanomanipulation systems (‘hands) and techniques for transporting, modifying, and interacting with micro/nanoscaled objects is lagging behind. Two generations of nanomanipulation systems were developed with high SEM compatibility. The vacuum load-lock feature allows setup/sample/end-tools changes to be made within minutes instead of hours as with existing nanomanipulation systems. The integrated high resolution encoders and automation features significantly ease the skill dependency in nanomanipulation. Its small shape factor minimizes effects on SEM imaging performance, and does not restrict the use of the many detectors inside a SEM. The new nanomanipulation systems were applied to the manipulation of sub-cellular structures and the characterization of nano-structures. The first application involves the development of a technique to surgically extract sub-micrometer-sized subnuclear structures within a single cell’s nucleus, followed by biochemical analysis to amplify and sequence the genes contained within. Enabled by the technique, four novel genomic loci associations with promyelocytic leukemia nuclear bodies (PML NB) were discovered in Jurkat cells. The second application targets automated probing of nanostructures under poor imaging conditions. Through real-time image drift compensation and visual servoing of the nano probes, automated probing of nanostructures was achieved with a high success rate and a speed at least three times higher than skilled operator. To enhance the functions of the nanomanipulation system, new types of end-effectors were also developed. A MEMS tool with changeable tool tips was design and prototyped. In-situ (i.e., inside SEM) tool tip change was demonstrated for gripping objects that vary in size by two orders of magnitude (15 um to 100 nm) with a single microgripper body. Furthermore, a microfabrication process was developed to produce changeable nano-spatulas with tip size less than 10 nm, intended for use in the subnuclear structure extraction work. Finally, a local precursor sublimation technique compatible with the nanomanipulation system was developed for enhancing electron beam induced deposition (EBID) inside the SEM.

A nanomanipulation system operating inside a scanning electron microscope (SEM) enables visual observation and physical interactions with objects at the nanometer scale. Compared to SEM that is a powerful imaging platform (‘eyes’), the development of nanomanipulation systems (‘hands) and techniques for transporting, modifying, and interacting with micro/nanoscaled objects is lagging behind. Two generations of nanomanipulation systems were developed with high SEM compatibility. The vacuum load-lock feature allows setup/sample/end-tools changes to be made within minutes instead of hours as with existing nanomanipulation systems. The integrated high resolution encoders and automation features significantly ease the skill dependency in nanomanipulation. Its small shape factor minimizes effects on SEM imaging performance, and does not restrict the use of the many detectors inside a SEM. The new nanomanipulation systems were applied to the manipulation of sub-cellular structures and the characterization of nano-structures. The first application involves the development of a technique to surgically extract sub-micrometer-sized subnuclear structures within a single cell’s nucleus, followed by biochemical analysis to amplify and sequence the genes contained within. Enabled by the technique, four novel genomic loci associations with promyelocytic leukemia nuclear bodies (PML NB) were discovered in Jurkat cells. The second application targets automated probing of nanostructures under poor imaging conditions. Through real-time image drift compensation and visual servoing of the nano probes, automated probing of nanostructures was achieved with a high success rate and a speed at least three times higher than skilled operator. To enhance the functions of the nanomanipulation system, new types of end-effectors were also developed. A MEMS tool with changeable tool tips was design and prototyped. In-situ (i.e., inside SEM) tool tip change was demonstrated for gripping objects that vary in size by two orders of magnitude (15 um to 100 nm) with a single microgripper body. Furthermore, a microfabrication process was developed to produce changeable nano-spatulas with tip size less than 10 nm, intended for use in the subnuclear structure extraction work. Finally, a local precursor sublimation technique compatible with the nanomanipulation system was developed for enhancing electron beam induced deposition (EBID) inside the SEM.

Thesis (M.S.)--Brigham Young University. School of Technology, 2006. / Includes bibliographical references (p. 153-160).

Thesis (Ph. D.)--University of Technology, Sydney, 2005.

No description available.

No description available.

by Chan, Ray. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1994. / Includes bibliographical references (leaves [93-96]). / ACKNOWLEDGMENT / ABSTRACT / FIGURE CAPTIONS / TABLE CAPTIONS / INTRODUCTION / Chapter I. --- PRINCIPLES OF SEM / Chapter 1.1 --- STRUCTURE OF SEM --- p.1-1 / Chapter 1.2 --- IMAGE FORMATION --- p.1-6 / Chapter 1.2.1 --- Electron Beam-Specimen Interaction --- p.1-6 / Chapter 1.2.1.1 --- Electron scattering in solid specimen --- p.1-7 / Chapter 1.2.1.2 --- Electron range and spatial distribution --- p.1-7 / Chapter 1.2.1.3 --- Back scattered electrons(BE) --- p.1-8 / Chapter 1.2.1.4 --- Secondary electron(SE) --- p.1-9 / Chapter 1.2.1.5 --- Other signal types --- p.1-13 / Chapter 1.2.2 --- Types of Image Contrast --- p.1-14 / Chapter 1.3 --- DISTORTION AND NOISE --- p.1-17 / Chapter 1.3.1 --- Lens Aberration --- p.1-17 / Chapter 1.3.1.1 --- Spherical aberration --- p.1-17 / Chapter 1.3.1.2 --- Chromatic aberration --- p.1-18 / Chapter 1.3.1.3 --- Diffraction effect --- p.1-19 / Chapter 1.3.1.4 --- Axial astigmatism --- p.1-20 / Chapter 1.3.1.5 --- Spatial resolution calculation --- p.1-21 / Chapter 1.3.2 --- Image Defects --- p.1-22 / Chapter 1.3.2.1 --- Projection distortion --- p.1-22 / Chapter 1.3.2.2 --- Specimen tilting --- p.1-22 / Chapter 1.3.2.3 --- Moire effects --- p.1-22 / Chapter 1.3.3 --- Noise in SEM --- p.1-23 / Chapter II. --- SEM FOR IC TESTING / Chapter 2.1 --- QUANTITATIVE ANALYSIS OF VOLTAGE MEASUREMENT --- p.2-1 / Chapter 2.1.1 --- Energy Analysis of SEs --- p.2-1 / Chapter 2.1.2 --- Suppression of Local Fields --- p.2-2 / Chapter 2.1.3 --- "Elimination of Topography, Material Contrast and Work Function Variation" --- p.2-2 / Chapter 2.2 --- VOLTAGE RESOLUTION --- p.2-3 / Chapter 2.3 --- TIME RESOLUTION --- p.2-4 / Chapter 2.3.1 --- SE Generation Time --- p.2-4 / Chapter 2.3.2 --- SE Flight Time --- p.2-4 / Chapter 2.3.3 --- Required Voltage Resolution --- p.2-5 / Chapter 2.3.4 --- Electron Beam Pulse Width --- p.2-5 / Chapter 2.4 --- SPATIAL RESOLUTION --- p.2-5 / Chapter 2.5 --- CAPACITIVE COUPLING VOLTAGE CONTRAST --- p.2-6 / Chapter III. --- SEM TESTING TECHNIQUES / Chapter 3.1 --- CONVENTIONAL TESTING METHODS SYNOPSIS --- p.3-1 / Chapter 3.2 --- TESTING TECHNIQUES FOR SEM --- p.3-2 / Chapter 3.2.1 --- Static Mode --- p.3-2 / Chapter 3.2.2 --- Frequency Matching Mode --- p.3-3 / Chapter 3.2.2.1 --- Voltage coding --- p.3-4 / Chapter 3.2.2.2 --- Stroboscopy --- p.3-4 / Chapter 3.2.2.3 --- Waveform measurement --- p.3-6 / Chapter 3.2.2.4 --- Logic state mapping --- p.3-6 / Chapter 3.2.2.5 --- Frequency tracing --- p.3-7 / Chapter 3.2.2.6 --- Frequency mapping --- p.3-8 / Chapter 3.2.2.7 --- Logic state tracing --- p.3-9 / Chapter IV. --- CONVERT AMRAY 1830 INTO E-BEAM TESTER / Chapter 4.1 --- DESIGN CONSIDERATION --- p.4-1 / Chapter 4.1.1 --- Application Consideration --- p.4-1 / Chapter 4.1.2 --- Limitation of the AMRAY 1830 --- p.4-1 / Chapter 4.1.2.1 --- Detection system --- p.4-2 / Chapter 4.1.2.2 --- Scanning driver --- p.4-3 / Chapter 4.1.2.3 --- Beam blanker --- p.4-4 / Chapter 4.1.2.4 --- NibbleNet interface --- p.4-5 / Chapter 4.2 --- HARDWARE ARCHITECTURE --- p.4-6 / Chapter 4.2.1 --- SEM Circuit Varied --- p.4-7 / Chapter 4.2.1.1 --- Adding scanning relays --- p.4-7 / Chapter 4.2.1.2 --- Voltage clippers --- p.4-7 / Chapter 4.2.1.3 --- External scan interface in SEM --- p.4-9 / Chapter 4.2.2 --- PC Interface --- p.4-9 / Chapter 4.2.3 --- Driver Box --- p.4-10 / Chapter 4.2.3.1 --- Data preprocess unit --- p.4-10 / Chapter 4.2.3.2 --- Scanning preprocess unit --- p.4-12 / Chapter 4.2.3.3 --- Control unit --- p.4-12 / Chapter 4.2.4 --- Scanning Generation and Data Acquisition --- p.4-13 / Chapter 4.3 --- SOFTWARE DEVELOPED --- p.4-13 / Chapter 4.3.1 --- Function Library --- p.4-13 / Chapter 4.3.2 --- Integrated Environment --- p.4-14 / Chapter V. --- SYSTEM PERFORMANCE / Chapter 5.1 --- CHARACTERISTICS OF THE SCANNING DRIVERS --- p.5-1 / Chapter 5.1.1 --- Driver Output Changes with Acceleration Voltage --- p.5-2 / Chapter 5.1.2 --- Driver Output Changes with magnification --- p.5-3 / Chapter 5.1.3 --- Frequency Response --- p.5-4 / Chapter 5.1.4 --- Image Distortion --- p.5-7 / Chapter 5.2 --- INTEGRATED STUDY ENVIRONMENT --- p.5-9 / Chapter 5.2.1 --- Setting Status --- p.5-9 / Chapter 5.2.2 --- Image Scanning & Image Saving --- p.5-12 / Chapter 5.2.3 --- Static Probing --- p.5-15 / Chapter 5.2.4 --- Point Probing --- p.5-19 / Chapter 5.2.5 --- Frequency Matching --- p.5-20 / Chapter V. --- SUMMARY --- p.6-1 / REFERENCE / APPENDIX: / Chapter A. --- PROGRAM LISTING / Chapter B. --- CIRCUIT SCHEMATICS