Este trabalho apresenta a modelagem, identificação de parâmetros e projeto do sistema de controle de um atuador rotacional antagônico com refrigeração forçada baseado em fios de liga de memória de forma, tendo em vista a aplicação em manipuladores robóticos. O modelo é baseado na abordagem de transformação de fases por subcamadas, que leva em conta a alta não linearidade que ocorre devido à dinâmica de transformação de fases do fio de memória de forma (especialmente a alta histerese envolvida). Um algoritmo de otimização por meio de Programação Quadrática Sequencial é então usado para se estimar os parâmetros do modelo de difícil obtenção exata, como as temperaturas de transição de fase dos fios de liga de memória de forma e o coeficiente de convecção. A função objetivo adotada é o erro entre a posição medida experimentalmente e a posição obtida por meio de modelagem e simulação. Parte-se de valores de parâmetros iniciais de tabela para a aplicação do algoritmo. Os resultados são em seguida comparados e avaliados com experimentos independentes em malha aberta, com o modelo apresentando boa correlação com a planta para uma excitação de até 2,0 Hz. Por fim, um sistema de controle não linear por modos deslizantes baseado no modelo é desenvolvido e simulado utilizando o modelo estimado, tanto em modo de controle de torque como em controle de posição. Aplica-se um controlador com camada limite e linearização utilizando a realimentação dos estados e o modelo estimado. Este tipo de controlador é robusto a eventuais diferenças entre o modelo e o sistema real. O controlador é então utilizado num modelo sistema de experimental, a partir do qual são obtidos resultados de desempenho dinâmico e exatidão do atuador controlado ao mesmo tempo em que são feitas comparações com os resultados das simulações. Por fim, demonstra-se que os objetivos iniciais do trabalho são atingidos, ao se realizar satisfatoriamente o controle de posição e de torque com robustez, exatidão e desempenho dinâmico adequados à aplicação prevista. / This work presents the modeling, grey-box parameter estimation and control design of a force-cooled antagonistic shape memory alloy (SMA) rotational actuator, having in mind the application in robotic manipulators. The model is based on a sub-layer phase transformation approach, taking account the large non-linearities that rise from the phase-transformation dynamics (in special, the highly hysteretic dynamics). An optimization Quadratic Sequential Programming Algorithm is used to for estimate estimating the model parameters, which are hard to obtain accurately, like the such as phase transition temperatures of the shape memory alloy wires and the convection coefficient. The objective function adopted is the error between the experimentally measured position and the position obtained by means of modeling and simulation. Initial parameters for the algorithm application are taken from factory tables\' datasheets. The results are then compared and evaluated with independent open loop experiments. At last, a model based nonlinear shape memory alloy SMA control scheme is designed and simulated using the estimated model, in torque and position control modes. The control scheme applied uses limit layer and feedback linearization using based on the estimated model. This control scheme is robust to eventual mismatch between modeling and the real system. The controller is then used in an experimental model, from which results of dynamic behavior and accuracy of the controlled actuator are obtained and compared with the simulated results. At last, it is showed that the initial objectives of this work are achieved, by satisfactorily performing position and torque control with robustness, accuracy and dynamic performances adequate to the application targeted.

Este trabalho apresenta a modelagem, identificação de parâmetros e projeto do sistema de controle de um atuador rotacional antagônico com refrigeração forçada baseado em fios de liga de memória de forma, tendo em vista a aplicação em manipuladores robóticos. O modelo é baseado na abordagem de transformação de fases por subcamadas, que leva em conta a alta não linearidade que ocorre devido à dinâmica de transformação de fases do fio de memória de forma (especialmente a alta histerese envolvida). Um algoritmo de otimização por meio de Programação Quadrática Sequencial é então usado para se estimar os parâmetros do modelo de difícil obtenção exata, como as temperaturas de transição de fase dos fios de liga de memória de forma e o coeficiente de convecção. A função objetivo adotada é o erro entre a posição medida experimentalmente e a posição obtida por meio de modelagem e simulação. Parte-se de valores de parâmetros iniciais de tabela para a aplicação do algoritmo. Os resultados são em seguida comparados e avaliados com experimentos independentes em malha aberta, com o modelo apresentando boa correlação com a planta para uma excitação de até 2,0 Hz. Por fim, um sistema de controle não linear por modos deslizantes baseado no modelo é desenvolvido e simulado utilizando o modelo estimado, tanto em modo de controle de torque como em controle de posição. Aplica-se um controlador com camada limite e linearização utilizando a realimentação dos estados e o modelo estimado. Este tipo de controlador é robusto a eventuais diferenças entre o modelo e o sistema real. O controlador é então utilizado num modelo sistema de experimental, a partir do qual são obtidos resultados de desempenho dinâmico e exatidão do atuador controlado ao mesmo tempo em que são feitas comparações com os resultados das simulações. Por fim, demonstra-se que os objetivos iniciais do trabalho são atingidos, ao se realizar satisfatoriamente o controle de posição e de torque com robustez, exatidão e desempenho dinâmico adequados à aplicação prevista. / This work presents the modeling, grey-box parameter estimation and control design of a force-cooled antagonistic shape memory alloy (SMA) rotational actuator, having in mind the application in robotic manipulators. The model is based on a sub-layer phase transformation approach, taking account the large non-linearities that rise from the phase-transformation dynamics (in special, the highly hysteretic dynamics). An optimization Quadratic Sequential Programming Algorithm is used to for estimate estimating the model parameters, which are hard to obtain accurately, like the such as phase transition temperatures of the shape memory alloy wires and the convection coefficient. The objective function adopted is the error between the experimentally measured position and the position obtained by means of modeling and simulation. Initial parameters for the algorithm application are taken from factory tables\' datasheets. The results are then compared and evaluated with independent open loop experiments. At last, a model based nonlinear shape memory alloy SMA control scheme is designed and simulated using the estimated model, in torque and position control modes. The control scheme applied uses limit layer and feedback linearization using based on the estimated model. This control scheme is robust to eventual mismatch between modeling and the real system. The controller is then used in an experimental model, from which results of dynamic behavior and accuracy of the controlled actuator are obtained and compared with the simulated results. At last, it is showed that the initial objectives of this work are achieved, by satisfactorily performing position and torque control with robustness, accuracy and dynamic performances adequate to the application targeted.

Submitted by Kilvya Braga (kilvyabraga@hotmail.com) on 2018-04-27T13:03:39Z No. of bitstreams: 1 ANGELO EMILIAVACA - DISSERTAÇÃO (PPGEM) 2016.pdf: 5881090 bytes, checksum: 6d09fd532b88ebec2b8684dfb0e6455f (MD5) / Made available in DSpace on 2018-04-27T13:03:39Z (GMT). No. of bitstreams: 1 ANGELO EMILIAVACA - DISSERTAÇÃO (PPGEM) 2016.pdf: 5881090 bytes, checksum: 6d09fd532b88ebec2b8684dfb0e6455f (MD5) Previous issue date: 2016-02-04 / CNPq / O desenvolvimento da indústria aeronáutica tem provocado alterações significativas nos conceitos atualmente aplicados em aeronaves, sejam elas para fins civis ou militares. Estas mudanças são, em parte, consequência da conscientização ambiental que tem pressionado as indústrias a produzirem aeronaves mais eficientes e menos poluidoras para continuarem competitivas. O impacto destas mudanças sobre o projeto e construção de aeronaves é a busca incessante por conceitos que aumentem a eficiência das aeronaves em um maior espectro de voo sem impactar a segurança e confiabilidade destes sistemas. Neste contexto surge o conceito de aeronaves adaptativas, capazes de se adaptar ao fluxo por mudanças aerodinâmicas sem comprometer a segurança do voo. Um dos conceitos usados em aeronaves adaptativas é o de asa adaptativa, com possibilidade de variação da curvatura do perfil aerodinâmico, o qual é adotado neste trabalho. Estas estruturas apresentam algumas limitações que ainda precisam ser desenvolvidas, como o sistema de atuação, sistema de controle e mecânica estrutural associada à mudança de forma. Baseado nestes aspectos, este trabalho descreve o desenvolvimento de um novo conceito de asa adaptativa, acionada por atuadores do tipo micromolas de liga com memória de forma (LMF). O protótipo desenvolvido, denominado de SMArt Morphing Wing, teve sua estrutura mecânica construída em polímero ABS por impressão 3D e um sistema de “pele” de recobrimento feito em chapa fina de acetato. O protótipo foi testado em vazio e sob carregamento aerodinâmico em túnel de vento, para avaliar a influência da pele e a resposta dos atuadores de LMF sob carga. Nos testes em vazio foram avaliadas as deflexões angulares máximas do protótipo com e sem pele, enquanto que nos testes sob carregamento aerodinâmico entre 6 m/s e 14 m/s, foram avaliadas as deflexões máximas e as forças de arrasto e de sustentação. Adicionalmente, usando a ferramenta computacional ANSYS® CFD, foram feitas análises teóricas do comportamento aerodinâmico do protótipo na condição mais crítica de deflexão e velocidade. A comparação entre os resultados numéricos e experimentais obtidos em túnel de vento revelaram uma boa concordância, confirmando a eficiência do protótipo desenvolvido. / The development of the aeronautic industry has caused significant changes in concepts currently applied in aircraft either for civil or military purposes. These changes are partly due to environmental awareness that has pushed the industry to produce more efficient and less polluting aircraft to remain competitive. The result of these changes on design and construction of aircraft is the incessant search for concepts that increase the efficiency of aircraft in a broader flight range without impacting on the safety and reliability of these systems. In this context arises the concept of adaptive aircraft, which are able to adapt to the flow of aerodynamic changes without compromising flight safety. One of the concepts of morphing aircraft is the morphing wing, with the possibility of variation airfoil camber, which is used in this work. These structures have some limitations that need to be developed as the actuation system, control system and structural mechanics associated with the shape change. Based on these aspects, this work describes the development of a new concept of adaptive wing, driven by shape memory alloy (SMA) micro coil springs like actuator. The prototype, called SMArt Morphing Wing, had its mechanical structure built in ABS polymer for 3D printing and a system of "skin" made of thin sheet of acetate. The prototype was tested unloaded and under aerodynamic loading on the wind tunnel, to evaluate the influence of the skin and the response of SMA actuators under load. In the no load tests were evaluated the maximum angular deflection of the prototype with and without skin, whereas in tests under aerodynamic loading between 6m/s and 14m/s, the maximum deflection, drag and lift forces were evaluated. Additionally, using the computational tool ANSYS® CFD, theoretical analyses of the aerodynamic behavior of the prototype in the most critical condition deflection and speed they were made. The comparison between the numerical and experimental results obtained in wind tunnel showed good agreement, confirming the efficiency of the developed prototype.

Doctor of Philosophy (PhD) / With improvements in actuation technology and sensory systems, it is becoming increasingly feasible to create powered exoskeletal garments that can assist with the movement of human limbs. This class of robotics referred to as human-machine interfaces will one day be used for the rehabilitation of paralysed, damaged or weak upper and lower extremities. The focus of this project was the development of an exoskeletal interface for the rehabilitation of the hands. A novel sensor was designed for use in such a device. The sensor uses simple optical mechanisms centred on a spring to measure force and position simultaneously. In addition, the sensor introduces an elastic element between the actuator and its corresponding hand joint. This will allow series elastic actuation (SEA) to improve control and safely of the system. The Hand Rehabilitation Device requires multiple actuators. To stay within volume and weight constraints, it is therefore imperative to reduce the size, mass and efficiency of each actuator without losing power. A method was devised that allows small efficient actuating subunits to work together and produce a combined collective output. This work summation method was successfully implemented with Shape Memory Alloy (SMA) based actuators. The actuation, sensory, control system and human-machine interface concepts proposed were evaluated together using a single-joint electromechanical harness. This experimental setup was used with volunteer subjects to assess the potentials of a full-hand device to be used for therapy, assessment and function of the hand. The Rehabilitation Glove aims to bring significant new benefits for improving hand function, an important aspect of human independence. Furthermore, the developments in this project may one day be used for other parts of the body helping bring human-machine interface technology into the fields of rehabilitation and therapy.

Doctor of Philosophy (PhD) / With improvements in actuation technology and sensory systems, it is becoming increasingly feasible to create powered exoskeletal garments that can assist with the movement of human limbs. This class of robotics referred to as human-machine interfaces will one day be used for the rehabilitation of paralysed, damaged or weak upper and lower extremities. The focus of this project was the development of an exoskeletal interface for the rehabilitation of the hands. A novel sensor was designed for use in such a device. The sensor uses simple optical mechanisms centred on a spring to measure force and position simultaneously. In addition, the sensor introduces an elastic element between the actuator and its corresponding hand joint. This will allow series elastic actuation (SEA) to improve control and safely of the system. The Hand Rehabilitation Device requires multiple actuators. To stay within volume and weight constraints, it is therefore imperative to reduce the size, mass and efficiency of each actuator without losing power. A method was devised that allows small efficient actuating subunits to work together and produce a combined collective output. This work summation method was successfully implemented with Shape Memory Alloy (SMA) based actuators. The actuation, sensory, control system and human-machine interface concepts proposed were evaluated together using a single-joint electromechanical harness. This experimental setup was used with volunteer subjects to assess the potentials of a full-hand device to be used for therapy, assessment and function of the hand. The Rehabilitation Glove aims to bring significant new benefits for improving hand function, an important aspect of human independence. Furthermore, the developments in this project may one day be used for other parts of the body helping bring human-machine interface technology into the fields of rehabilitation and therapy.

Shape memory alloys (SMAs) have been recognized as one of the most promising materials for MEMS micro-actuator applications. Among the available materials, Nickel/Titanium (NiTi) SMAs are more popular because, they exhibit unique properties in shape memory effect (SME) and pseudo-elasticity (PE). In addition NiTi SMA possesses high corrosion resistance, excellent mechanical properties and is also bio¬compatible. NiTi thin-film SMAs have been considered as the most significant material in the field of MEMS applications, which can be patterned with standard lithographic techniques to scale-up for batch production. However, the lack of proper understanding of basic materials’ properties and inability to reproduce, has limited the usage of this material in MEMS devices. The properties of NiTi SMA thin-films are very much sensitive to the elemental composition and structure, which are in turn decided by the deposition process and process parameters. A brief history of NiTi shape memory alloys (SMAs), basic information, transformation characteristics, crystal structure, phase diagram and literature reviewed for the current motivation have been presented in the second chapter In the third chapter, a brief summary about the deposition techniques relevant to NiTi film deposition has been presented. The deposition of NiTi films by a number of deposition techniques such as thermal evaporation, co-evaporation, molecular beam Epitaxy, pulsed laser deposition, flash evaporation, electron beam deposition, filtered arc deposition, ion beam assisted sputter deposition, vacuum plasma spraying, ion beam sputtering, ECR sputtering and magnetron sputtering techniques have been discussed. In order to achieve a precise control over film thickness and composition of the films on to the substrates, the selection of magnetron sputtering has been highlighted. In the present thesis, two prolonged approaches such as DC magnetron sputtering of an alloy target and co-sputtering of elemental targets have been presented. Various characterization techniques used for film thickness, composition, structure, micro¬structure, electrical, phase transformation and mechanical properties have also been briefly presented in the same chapter. In the fourth chapter, description of Conventional Alloy Target Sputtering System has been presented. DC magnetron sputtering of an alloy target with two different atomic ratios (Ni:Ti = 45:55 & 50:50) has been used for depositing the coatings. Several limitations in the reproducibility and repeatability have been observed with single alloy target sputtering, irrespective of the target composition ratio. In addition to this, incorporation of oxygen in the films during and after deposition has been observed, which has limited the extensive usage of this single alloy target system. The limitations regarding control over composition, thickness uniformity over large area have been improved by designing and fabricating a dedicated Three Target Magnetron Co-sputtering System. The vacuum diagnosis of the system under different conditions has been carried out by using PPR-200 Residual Gas Analyzer (RGA), which have included in Appendix I. Similar to alloy target sputtering system, the thickness uniformity and required composition with deposition parameters over a size of 75 mm diameter has been achieved and the process repeatability has been established. Oxygen incorporation in the films during deposition has been minimized by pre-sputtering of Ti target for known duration of time, which has resulted in significant reduction in partial pressure of oxygen in the chamber. The oxide layer formation on film surface has been eliminated by in-situ capping layer (TiN) deposition. In the fifth chapter, the influence of process parameters such as sample locations, substrate to target distance (STD), working pressure (WP), gas flow rates, deposition rates, deposition and annealing temperature, Target power, on the film thickness and composition uniformity have been presented for alloy target sputtering system as well as for the co-sputtering system. The film thicknesses have been measured with stylus method. Film compositions have been determined by energy dispersive X-ray spectroscopy (EDS), Secondary ion mass spectrometry (SIMS), Rutherford backscattering spectrometry (RBS) and X-ray photoelectron spectroscopy (XPS). The working pressure of 1.5 X 10-3 mbar, STD of 90 mm and target power of 100 W have been found to produce coatings having uniform thickness and composition over the given area for alloy target sputtering system. Similar investigations have been carried out for co-sputtered NiTiCu films. The working pressure of 1.5x 10-3 mbar, at a STD of 90 mm, at a rotational speed of 15 rpm and at target powers of 600, 50 and 12 W for Ti, Ni and Cu respectively, have resulted in the thickness and required composition uniformity over a size of 75 mm diameter substrate and the process repeatability has been established. In the Sixth chapter, the influence of process parameters on film structure and micro-structure on the NiTi/NiTiCu films deposited by a single alloy target and co¬sputtering have been studied by different analytical techniques like XRD, TEM, AFM, SEM etc. Phase transformation temperatures and kind of transformations have been investigated by DSC, Resistivity / Temperature and Stress/ Temperature studies and correlations have been established. The process parameters have been optimized for TiN deposition, which act as the capping layer to protect NiTi films from surface oxidation. The variation in mechanical behavior for the NiTi/ NiTiCu films before and after TiN capping by nano-indentation test have also presented. XRD and TEM studies have shown that the NiTi / NiTiCu films deposited at room temperature to 400o C are amorphous. Post-annealing, at a temperature of 450O C or above resulted in the film crystallization with oxide layer formation at the film surface, which has been confirmed by XRD and XTEM studies. In the case of Ni-rich NiTi films, R-phase diffraction peaks have also been identified in addition to the Austenite / Martensite phase. XRD investigations have shown that Ti-rich NiTi and Ni-rich NiTi films have resulted in precipitate free films. In the case of Ti-rich NiTiCu and Ni-rich NiTiCu films, the variations in Ti/Ni target power has resulted in the formation of NiTi 2 and Ni3Ti precipitates along with their parent Martensite and Austenite phases. When the Cu content is increased in NiTiCu films, an increase in number of Martensite phase diffraction peaks in XRD spectrum has been observed. XTEM studies have confirmed formation of oxide layer, inter-metallic layer and interface layer at higher post annealing temperatures. SEM studies have shown that the films deposited at higher gas flow rate results in the columnar micro-structure. In the context of NiTiCu films, the films deposited at higher Ti target power have shown more compact and tightly packed film micro-structure. AFM studies have shown increase in the average crystallite size and film roughness with post annealing temperature and duration. TiN coating has been used as the capping layer onto NiTi / NiTiCu films. Structural and micro-structural comparison of these films before and after TiN coating has resulted the appearance of (111) TiN peak in all TiN capped films. SEM and AFM studies have shown that the film roughness have decreased after capping layer deposition. DSC thermal cycling used to verify the film crystallization temperature has shown the appearance of exothermic peak in NiTi / NiTiCu films. DSC, Resistivity-temperature, stress-temperature response has been confirmed the transformation temperature and kind of transformations in all the films. Residual stress measurements have shown that the crystalline films exhibited lower bi-axial stress in comparison to the amorphous films. Ti-rich NiTi films have shown single phase transformations (M-A and A-M) whereas two phase transformations (M-R-A and A-R-M) have been observed in Ni-rich NiTi films. Higher deposition / annealing temperature have shown the appearance of distinct phase transformation peaks in resistivity vs. temperature studies. In the case of NiTiCu films, the decrease in film crystallization temperature with increase in the Cu content has been observed. The phase transformation temperature evaluated from second thermal cycle has shown decrease in the width of hysteresis loop with increase in the Cu content in NTC films. Nano-indentation studies have been carried out to evaluate the micro-hardness and modulus values of TiN capped and uncapped NiTi / NiTiCu films. The modulus and hardness uniformity have been confirmed for the different location over a diameter of 75 mm. The modulus and hardness values have increased with increase in the substrate and annealing temperature. Increase in the Cu target power has resulted in the increase in the hardness and modulus values under same deposition conditions. TiN coated NiTi / NiTiCu films have shown larger modulus and hardness values than the uncapped films. In the Seventh chapter, the fabrication process and actuation response for silicon dioxide, Aluminum and NiTi SMA coated micro-cantilevers has been discussed. Various nano-structures such as pyramids, beams and pillars by focused ion beam (FIB) micro-machining have been fabricated. High aspect ratio nano-pillars have been selected for micro-compression testing. In summary, this thesis emphasizes on the fabrication of specific sputtering systems relevant to NiTi film deposition and process parameter optimization for desired film thickness and composition uniformity. DC magnetron sputtering of a NiTi alloy target (50:50 and 45:55 at. %) and co-sputtering of elemental targets (Ni, Ti and Cu) have been presented. These films have been investigated for structural, micro-structural, phase transformation and mechanical properties. In-situ deposition of TiN capping layer, on to NiTi / NiTiCu films has been carried out to reduce the oxygen trapping. The fabrication process and actuation response of micro-cantilevers have been described. The etching characteristics to generate various nano-structures viz. pyramids, beams and pillars by focused ion beam (FIB) micro-machining have been investigated and mechanical testing of selected nano-structures have also been reported.