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Analyse des processus de dérive lors de la gravure profonde du silicium dans des plasmas SF6 et C4F8Fradet, Mathieu 08 1900 (has links)
L’objectif de ce mémoire de maîtrise est de développer des outils de diagnostics non-invasifs et de caractériser in-situ les dérives de procédé dans un réacteur industriel utilisé en production pour la gravure profonde du silicium par le procédé Bosch. Ce dernier repose sur l’alternance d’un plasma de SF6 pour la gravure isotrope du Si et d’un plasma de C4F8 pour la passivation des parois dans l’optique d’obtenir des tranchées profondes et étroites. Dans un premier temps, nous avons installé une sonde courant-tension sur la ligne de transmission du signal rf au porte-substrat pour l’étude de son impédance caractéristique et un spectromètre optique pour l’étude de l’émission optique du plasma. Nos travaux ont montré que l’évolution temporelle de l’impédance constitue un excellent moyen pour identifier des changements dans la dynamique du procédé, notamment une gravure complète de la photorésine. De plus, à partir des spectres d’émission, nous avons pu montrer que des produits carbonés sont libérés du substrat et des parois lors de l’alternance passivation/gravure et que ceux-ci modifient considérablement la concentration de fluor atomique dans le plasma.
Dans un second temps, nous avons développé un réacteur à « substrat-tournant » pour l’analyse in-situ des interactions plasma-parois dans le procédé Bosch. Nos travaux sur ce réacteur visaient à caractériser par spectrométrie de masse l’évolution temporelle des populations de neutres réactifs et d’ions positifs. Dans les conditions opératoires étudiées, le SF6 se dissocie à près de 45% alors que le degré de dissociation du C4F8 atteint 70%. Le SF6 est avant tout dissocié en F et SF3 et l’ion dominant est le SF3+ alors que le C4F8 est fragmenté en CF, CF3 et CF4 et nous mesurons plusieurs ions significatifs. Dans les deux cas, la chaîne de dissociation demeure loin d’être complète. Nous avons noté une désorption importante des parois de CF4 lors du passage du cycle de passivation au cycle de gravure. Un modèle d’interactions plasmas-parois est proposé pour expliquer cette observation. / The purpose of this master thesis is to develop non-invasive diagnostic tools for in-situ characterization of process drifts in an industrial reactor used in production for deep silicon etching by the Bosch process. This process alternates between a SF6 plasma for isotropic Si etching and a C4F8 plasma for sidewall passivation to achieve deep and narrow trenches. In this context, a current-voltage probe was installed on the rf transmission line to the substrate holder for impedance studies and an optical spectrometer for plasma optical emission spectroscopy. We have shown that the time evolution of the impedance represents an excellent tool for monitoring changes in the process dynamics, including the complete removal of the photoresist due to process drifts. In addition, based on emission spectroscopy, we have demonstrated that carbon products are released from the substrate and reactor walls during etching.
A « spinning-wall » reactor was also developed for in-situ analysis of plasma-wall interactions. The main objective of our work on this reactor was to characterize the time evolution of the population of reactive neutrals and positive ions by plasma sampling mass spectrometry. Over the range of experimental conditions investigated, the percent dissociation of SF6 was 45%, while the one of C4F8 was 70%. SF6 was mostly dissociated in F and SF3, with SF3+ as the dominant ion. C4F8 is essentially fragmented in CF, CF3 and CF4 with many significant ions. In both cases, the dissociation chain remained incomplete. An important desorption of CF4 from the reactor walls was observed when going from passivation to etching cycles. A plasma-wall interaction model was proposed to explain such observation.
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Structure of bio-macromolecular complexes by solid-state Nuclear Magnetic Resonance / Structure de complexes biologiques macromoléculaires par Résonance Magnétique Nucléaire du solideBarbet-Massin, Emeline 03 May 2013 (has links)
La RMN du solide a récemment émergé en tant que technique très puissante en biologie structurale, permettant de caractériser au niveau atomique des systèmes qui ne peuvent être étudiés par d’autres méthodes. Des protocoles spécifiques à la RMN du solide sont à présent bien établis pour la préparation des échantillons, l’attribution des spectres et l’acquisition de contraintes structurales. Ensemble, ces protocoles ont ouvert la voie aux premières déterminations de structures tridimensionnelles de molécules biologiques à l’état solide avec une résolution atomique, et ce non seulement pour des échantillons protéiques microcristallins, mais également pour des systèmes plus complexes tels que des fibrilles ou des protéines membranaires.La détermination structurale de tels systèmes est cependant encore loin d’être une routine, et des avancées de plus large ampleur sont attendues grâce à des développements aux niveaux méthodologique et matériel. Pour cette raison, une majeure partie du travail présenté dans cette thèse a été consacrée au développement d’expériences à la fois nouvelles et sophistiquées pour améliorer la sensibilité et la résolution des méthodes déjà existantes pour attribuer les spectres et élargir les possibilités offertes par la RMN du solide en vue d’étudier la structure de systèmes protéiques plus larges. Ces développements reposent notamment sur l’utilisation de champs magnétiques très intenses et sur la rotation des échantillons à l’angle magique dans la gamme des très hautes vitesses angulaires. Nous montrons que dans ce cadre, il est possible de concevoir des expériences utilisant uniquement des champs radiofréquences à faible puissance ainsi que d’utiliser des transferts sélectifs, l’acquisition de corrélations à travers les liaisons chimiques et la détection proton.En particulier, nous montrons que des expériences de corrélation homonucléaire reposant sur des transferts scalaires deviennent une alternative compétitive aux expériences basées sur des transferts dipolaires. Deux nouvelles séquences d’impulsion permettant de détecter des corrélations 13C-13C à travers les liaisons chimiques avec une excellente résolution sont présentées; couplées à des transferts 15N-13C, elles permettent l’attribution des résonances de la chaîne principale des protéines avec une grande sensibilité.De plus, nous démontrons qu’il est possible d’obtenir des raies très fines pour les résonances de protons dans des protéines complètement protonées à l’état solide grâce à la rotation à l’angle magique à ultra-haute vitesse, sans avoir recours à la deutération. Dans ce contexte, nous avons développé de nouvelles stratégies permettant d’attribuer rapidement et de façon fiable les résonances des spins 1H, 15N, 13CO, 13CA et 13CB dans différentes classes de protéines, ainsi que pour mesurer des contraintes structurales à partir des distances entre protons. L’approche proposée repose sur la haute sensibilité des protons et accélère donc considérablement les processus d’attribution et de détermination structurale des protéines à l’état solide, comme illustré sur la protéine beta-2-microglobuline.Enfin, nous avons appliqué cette nouvelle approche pour réaliser l’attribution et l’étude structurale et fonctionnelle de trois catégories de complexes protéiques: les fibrilles amyloidogènes formées par beta-2-microglobuline, les nucléocapsides du virus de la rougeole, et les nucléocapsides d’Acinetobacter phage205. Nous avons également utilisé la technique de Polarisation Nucléaire Dynamique pour obtenir des informations sur l’ARN des nucléocapsides du virus de la rougeole.Nous considérons que les résultats présentés dans cette thèse représentent une avancée substantielle dans le domaine de la RMN du solide appliquée à la biologie structurale. Grâce aux progrès actuels dans ce domaine, l’impact de la RMN biomoléculaire à l’état solide promet d’augmenter dans les prochaines années. / Solid-state NMR has recently emerged as a key technique in modern structural biology, by providing information at atomic level for the characterization of a wide range of systems that cannot be investigated by other atomic-scale methods. There are now well established protocols for sample preparation, resonance assignment and collection of structural restraints, that have paved the way to the first three-dimensional structure determinations at atomic resolution of biomolecules in the solid state, from microcrystalline samples to fibrils and membrane-associated systems. These determinations are however still far from being routine, and larger breakthroughs are expected with further methodological and hardware developments. Accordingly, most of the work presented in this thesis consists of the development of new, sophisticated NMR experiments to improve the sensitivity and resolution of the currently existing schemes for resonance assignment and to extend the capabilities of solid-state NMR in terms of structural investigation of proteins for the analysis of large substrates. These developments notably rely on the use of very high magnetic fields and ultra-fast magic-angle spinning (MAS). We show the great potential of this particular regime, which enables the use of low-power experiments and the acquisition of selective cross-polarization transfers, through-bond correlations and 1H-detected correlations.In particular, we show that homonuclear correlation experiments based on through-bond transfers become competitive alternatives to dipolar transfer schemes. Two new pulse sequences that detect sensitive and resolved 13C-13C through-bond correlations are introduced, which coupled to 15N-13C dipolar transfer steps provide sensitive routes for protein backbone resonance assignment.Furthermore, we demonstrate that narrow 1H NMR line widths can be obtained for fully protonated proteins in the solid state under ultra-fast MAS, even without perdeuteration. In this context, we have developed new strategies for extensive, robust and expeditious assignments of the 1H, 15N, 13CO, 13CA and 13CB resonances of proteins in different aggregation states, and new schemes for the measurements of site-specific 1H-1H distance restraints. This approach relying on the very high sensitivity of 1H spins remarkably accelerates the processes of assignment and structure determination of proteins in the solid state, as shown by the assignment and de novo structure determination of native beta-2-microglobulin. Finally, we apply this new approach to perform resonance assignment and to study structural and dynamic features of three complex protein aggregates: amyloid fibrils formed by native and D76N beta-2-microglobulin, Acinetobacter phage 205 nucleocapsids and measles virus (MeV) nucleocapsids. We also used Dynamic Nuclear Polarization to obtain the first information about RNA in MeV nucleocapsids.We believe that the results presented in this thesis represent a substantial step forward for solid-state NMR in structural biology. With all the current advances in the field, the impact of biomolecular solid-state NMR is likely to increase in the next years.
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Mechanizing people, localizing modernity industrialization and social transformation in modern Egypt : al-Mahalla al-Kubra, 1910- 1958Hammad, Hanan Hassan 05 April 2013 (has links)
This dissertation tells the tale of al-Mahalla al-Kubra during the transition from handloom crafts to the mechanized textile industry and from a local community to a battleground for the nationalist cause in the first half of the twentieth century. By exploring the relationships between culture, politics, and modern industrialization and how subaltern groups shaped their local experiences of modernity in a setting remote from the central government and the cosmopolitan culture of Cairo and Alexandria, it unpacks the social history of men and women, artisans and workers, notables and fitiwwat who were situated between national capitalism and foreign domination. The goal is to write the history of the society from the bottom up and to write a history that is an alternative to the already established histories of nationalism and colonialism. It provides a historical reconstruction and analysis of the process of assimilation undergone by the recruited peasants into urban industrial life and explores the various ways in which they and the Mahallawiyya negotiated living together and dealt with their mutual hostility on an everyday basis. Identity is the core question in this process of assimilation. Did modern, horizontal class relations actually replace traditional, vertical communal and patronage relations? To what extent did the traditional social institutions help or hinder the process of adapting to forms of social life associated with modern industry? I argue that both vertical class and horizontal communal relations co-existed and sometimes competed. In that fluid dynamic, individuals and groups acted and interacted depending on their socio-economic status, communal commitments, conjuncture or the way that a given situation developed, and a shared, often contested, discourse. / text
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Dynamics and thermal behaviour of films of oriented DNA fibres investigated using neutron scattering and calorimetry techniquesValle Orero, Jessica 26 June 2012 (has links) (PDF)
The majority of structural studies on DNA have been carried out using fibre diffraction, while studies of its dynamics and thermal behaviour have been mainly performed in solution. When the DNA double helix is heated, it exhibits local separation of the two strands that grow in size with temperature and lead to their complete separation. This work has investigated various aspects of this phenomenon. The experiments reported in this thesis were carried out on films of oriented fibres of DNA prepared with the Wet Spinning Apparatus. Thus, sample preparation and characterisation are essential parts of the research. The structures of two forms of DNA, A and B, have been explored as a function of relative humidity at fixed ionic conditions. A method to eliminate traces of ever-present B-form contamination in A-form samples was established. The high orientation of the DNA molecules within the samples allowed us to investigate dynamical fluctuations and the melting transition of DNA using neutron scattering, which can provide the spatial information crucial to understand a phase transition, probing the static correlation length along the molecule as a function of temperature. The transition has been investigated for A and B-forms in order to understand its dependence on molecular configuration.Furthermore, after the first melting, denatured DNA films show typical glass behaviour. Their thermal relaxation has been explored using calorimetry.Neutron and X-ray inelastic scattering (INS and IXS) were used in the past to measure longitudinal phonons in fibre DNA, and the results shown disagreement. Recent INS measurements supported with phonon simulations have been crucial to understand the different dispersion curves reported to date. Experiments using INS and IXS have been carried out to continue with this investigation. Attempts to observe the transverse fluctuations associated to the thermal denaturing of DNA, never experimentally investigated before, have been made.
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Optimierter Einsatz eines 3D-Laserscanners zur Point-Cloud-basierten Kartierung und Lokalisierung im In- und Outdoorbereich / Optimized use of a 3D laser scanner for point-cloud-based mapping and localization in indoor and outdoor areasSchubert, Stefan 05 March 2015 (has links) (PDF)
Die Kartierung und Lokalisierung eines mobilen Roboters in seiner Umgebung ist eine wichtige Voraussetzung für dessen Autonomie. In dieser Arbeit wird der Einsatz eines 3D-Laserscanners zur Erfüllung dieser Aufgaben untersucht. Durch die optimierte Anordnung eines rotierenden 2D-Laserscanners werden hochauflösende Bereiche vorgegeben. Zudem wird mit Hilfe von ICP die Kartierung und Lokalisierung im Stillstand durchgeführt. Bei der Betrachtung zur Verbesserung der Bewegungsschätzung wird auch eine Möglichkeit zur Lokalisierung während der Bewegung mit 3D-Scans vorgestellt. Die vorgestellten Algorithmen werden durch Experimente mit realer Hardware evaluiert.
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[en] OPERATING RESERVE ASSESSMENT IN MULTI-AREA SYSTEMS WITH RENEWABLE SOURCES VIA CROSS ENTROPY METHOD / [pt] PLANEJAMENTO DA RESERVA OPERATIVA EM SISTEMAS MULTIÁREA COM FONTES RENOVÁVEIS VIA MÉTODO DA ENTROPIA CRUZADAJOSÉ FILHO DA COSTA CASTRO 11 January 2019 (has links)
[pt] A reserva girante é a parcela da reserva operativa provida por geradores sincronizados, e interligados à rede de transmissão, aptos a suprir a demanda na ocorrência de falhas de unidades de geração, erros na previsão da demanda, variações de capacidade de fontes renováveis ou qualquer outro fator inesperado. Dada sua característica estocástica, essa parcela da reserva operativa é mais adequadamente avaliada por meio de métodos capazes de representar as incertezas inerentes ao seu dimensionamento e planejamento. Por meio do risco de corte de carga é possível comparar e classificar distintas configurações do sistema elétrico, garantindo a não violação dos requisitos de confiabilidade. Sistemas com elevada penetração de fontes renováveis apresentam comportamento mais complexo devido ao aumento das incertezas envolvidas, à forte dependência de fatores energético-climáticos e às variações de capacidade destas fontes. Para avaliar as correlações temporais e representar a cronologia de ocorrência dos eventos no curto-prazo, um estimador baseado na Simulação Monte Carlo Quase Sequencial é apresentado. Nos estudos de planejamento da operação de curto-prazo o horizonte em análise é de minutos a algumas horas. Nestes casos, a ocorrência de falhas em equipamentos pode apresentar baixa probabilidade e contingências que causam corte de carga podem ser raras. Considerando a raridade destes eventos, as avaliações de risco são baseadas em técnicas de amostragem por importância. Os parâmetros de simulação são obtidos por um processo numérico adaptativo de otimização estocástica, utilizando os conceitos de Entropia Cruzada. Este trabalho apresenta uma metodologia de avaliação dos montantes de reserva girante em sistemas com participação de fontes renováveis, em uma abordagem multiárea. O risco de perda de carga é estimado considerando falhas nos sistemas de geração e transmissão, observando as restrições de transporte e os limites de intercâmbio de potência entre as diversas áreas elétricas. / [en] The spinning reserve is the portion of the operational reserve provided by synchronized generators and connected to the transmission network, capable of supplying the demand considering generating unit failures, errors in load forecasting, capacity intermittency of renewable sources or any other unexpected factor. Given its stochastic characteristic, this portion of the operating reserve is more adequately evaluated through methods capable of modeling the uncertainties inherent in its design and planning. Based on the loss of load risk, it is possible to compare different configurations of the electrical system, ensuring the non-violation of reliability requirements. Systems with high penetration of renewable sources present a more complex behavior due to the number of uncertainties involved, strong dependence of energy-climatic factors and variations in the capacity of these sources. In order to evaluate the temporal correlations and to represent the chronology of occurrence of events in the short term, an estimator based on quasi-sequential Monte Carlo simulation is presented. In short-term operation planning studies, the horizon under analysis is from minutes to a few hours. In these cases, the occurrence of equipment failures may present low probability and contingencies that cause load shedding may be rare. Considering the rarity of these events, risk assessments are based on importance sampling techniques. The simulation parameters are obtained by an adaptive numerical process of stochastic optimization, using the concept of Cross Entropy. This thesis presents a methodology for evaluating the amounts of spinning reserve in systems with high penetration of renewable sources, in a multi-area approach. The risk of loss of load is estimated considering failures in the generation and transmission systems, observing the network restrictions and the power exchange limits between the different electric areas.
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Sportovní centrum / Sports centreVančura, Jakub January 2015 (has links)
The aim of this master thesis is proposal of a sport center building. The proposal consists of design of a detached building with room for climbing gym, sauna, massage room and also space for fitness, spinning and yoga. A bar with area for relaxing is a part of the building as well. The sport center has two floors and no basement. Due to the climbing gym, the second floor does not cover all disposition of the second floor. The support system of the building is skeletal. Part of the building´s roof is supported by steel truss frames with purlins, another part with solid panel trusses with purlins. The cieling is made of holoribs and reinforced concrete. The building is covered by single layer roof and has ventilated facade.
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Sportovní centrum s restaurací v Holešově / Sports center with restaurant in HolěšovFridrich, Michal January 2017 (has links)
The diploma thesis called ,,Sports center with restaurant in Holesov” is written in form of implementing project documentation and contains all requirements according to current laws. Proposed object is located on a plot 461/1 in Partyzanska street, Holesov. The object is separate building situated into north part of the plot. The designed building has two floors, no basement and is covered with flat roof. Foundations of the building are design as foundations strips with concrete slabs under column. Vertical carrier system, non-carrier constructions and separating constructions of the building contain ceramic clay block Porotherm. The carrier system is supported by reinforced concrete. Ceiling construction is made of ceiling panels Spiroll. The flat roof contains heat-insulation wedges and roof drains and overflows insurance for drainage. Main walls are covered with contact insulation system and the visual part of facade is made of facade blocks Cembrit Solid mounted to wooden grate which are attached to metal anchors. The object is divided into two main parts with shared entrance. First part is located in the ground floor and is designated for restaurant, bowling centre and back office including kitchen and bar. The other part of the building is designated for sports use. The ground floor contains two squash courts with facilities and first floor is divided into parts prepared for a gym and group lessons like spinning. This separate part has its own changing rooms and toilets with showers. The designed object is barrier-free. There is also a parking with 65 lots for vehicles. Four of them are designated for disabled visitors.
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Zur Dynamik geometrisch nichtlinearer BalkenWeiß, Holger 01 December 1999 (has links)
Ziel der Arbeit ist es, die instationären zeitlichen und räumlichen Bewegungsabläufe stark deformierbarer eindimensionaler Kontinua durch ein allgemeines mechanisch-mathematisches Modell unter Berücksichtigung ihrer Biege- und Torsionssteifigkeit zu beschreiben und zu dessen Lösung geeignete numerische Verfahren zu testen und auszuwählen. Die entwickelten Algorithmen werden auf Aufgabenstellungen aus der Raumfahrt-, Meeres- und Textiltechnik angewendet. / It is the aim of this thesis to describe the instationary motion of flexible one-dimensional continua by a general mechanical-mathematical model, when bending and torsional stiffness is not negligible, and to test and select appropriate numerical solution methods. The developed algorithms are used to solve problems from space, marine and textil engineering.
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Innovative twisting mechanism based on superconducting technology in a ring-spinning systemHossain, Mahmud, Abdkader, Anwar, Cherif, Chokri, Sparing, Maria, Berger, Dietmar, Fuchs, Günter, Schultz, Ludwig 17 September 2019 (has links)
Twist plays an important role to impart tensile strength in yarn during the spinning process. In the most widely used ring-spinning machine for short staple yarn production, a combination of ring and traveler is used for inserting twist and winding the yarn on cops. The main limitation of this twisting mechanism is the friction between the ring and traveler, which generates heat at higher speed and limits the productivity. This limitation can be overcome by the implementation of a magnetic bearing system based on superconducting technology, which replaces completely the existing ring/traveler system of the ring-spinning machine. This superconducting magnet bearing consists of a circular superconductor and permanent magnet ring. After cooling the superconductor below its transition temperature, the permanent magnet ring levitates and is free to rotate above the superconductor ring according to the principles of superconducting levitation and pinning. Thus the superconducting magnetic bearing (SMB) ensures a friction-free operation during spinning and allows one to increase spindle speed and productivity drastically. The yarn properties using the SMB system have also been investigated and they remain nearly identical to those of conventional ring yarns.
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