The AAO membrane with nanopore arrays were fabricated by anodizing highly pure aluminum foils (99.9995%) in electrolyte. Ordered array have been obtained under optimized anodizing condition, and pore diameter can be controlled by different anodic voltage and electrolyte. After we got such an ordered arrangement porous alumina array, the following analysis of the material optical properties were characterized. Photoluminescence measurements showed a strong PL peak in blue. The PL peak was 420nm excited by He-Cd laser. From the transmittance spectra, the results showed that material was transparent above 400nm. The XRD spectra of AAO without and with annealing, both showed the diffraction peaks of (311)¡B(400)¡B(440), corresponding to the £^-Al2O3 phase appear. High ordered anodic porous alumina with holes interval 65nm was prepared in mixture solution of H3PO4 and H2SO4 under high temperature and high concentration. Through the use of porous anodic alumina masks, nanopore arrays were fabricated on Si¡BGaAs substrates by reactive ion etching. Also, metal nanodot arrays were formed through the AAO mask by evaporation. Thin AAO slabs also enhance the light extraction from the QDs, and control the PL emission wavelength.