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The Global ETD Search service is a free service for researchers
to find electronic theses and dissertations. This service is
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Networked Digital Library of Theses and Dissertations.
Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
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Showing 1 to 4 of 4 (0.079 seconds)Spelling suggestions: "subject:"beschleunigungsmessung"" "subject:"beschleunigungssensor""
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Niederfrequente Restbeschleunigungen bemannter Raumfahrzeuge in der Erdumlaufbahn : 13 Tabellen /Schmitt, Thomas. January 1999 (has links) (PDF)
Zugl.: München, Techn. Univ., Diss., 1998.
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Untersuchungen zum Einfluss der Geologie im Grossraum Köln auf die Form elastischer BeschleunigungsantwortspektrenRöhner, Jens January 2005 (has links)
Zugl.: Berlin, Techn. Univ., Diss., 2005
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A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal TechnologyYamane, Daisuke, Konishi, Toshifumi, Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Toshiyoshi, Hiroshi, Masu, Kazuya, Sone, Masato, Machida, Katsuyuki 22 July 2016 (has links) (PDF)
This paper reports the evaluation results of the mechanical structures of MEMS (micro electro mechanical systems) sensor implemented in the integrated MEMS inertial sensor for a wide sensing range from below 0.1 G to 20 G (1 G = 9.8 m/s^2). To investigate the mechanical tolerance, a maximum target acceleration of 20G was applied to the sub-1G sensor which had the heaviest proof mass of all that sensors had. The structure stability of Ti/Au multi-layered structures was also examined by using Ti/Au micro cantilevers. The results showed that the stoppers effectively functioned to prevent the proof mass and the springs from self-destruction, and that the stability of Ti/Au structures increased with an increase in width. Those results suggest that the proposed stopper and spring structures could be promising to realize MEMS sensors.
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| 4 |
A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal TechnologyYamane, Daisuke, Konishi, Toshifumi, Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Toshiyoshi, Hiroshi, Masu, Kazuya, Sone, Masato, Machida, Katsuyuki 22 July 2016 (has links)
This paper reports the evaluation results of the mechanical structures of MEMS (micro electro mechanical systems) sensor implemented in the integrated MEMS inertial sensor for a wide sensing range from below 0.1 G to 20 G (1 G = 9.8 m/s^2). To investigate the mechanical tolerance, a maximum target acceleration of 20G was applied to the sub-1G sensor which had the heaviest proof mass of all that sensors had. The structure stability of Ti/Au multi-layered structures was also examined by using Ti/Au micro cantilevers. The results showed that the stoppers effectively functioned to prevent the proof mass and the springs from self-destruction, and that the stability of Ti/Au structures increased with an increase in width. Those results suggest that the proposed stopper and spring structures could be promising to realize MEMS sensors.
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