In this work a reversible transition between CeO2/Cu(111) and Ce2O3/Cu(111) was studied by metalic ceria evaporation and oxygen exposition. Prepared layers were characterised by XPS, ISS (and its angle resolved modification), LEED and XPD combined with computer modelling using EDAC code. Four reconstructi- on were identified within the transition - ( √ 7 × √ 7)R19.1◦ , ( √ 3 × √ 3)R30◦ , 3 × 3 and 4 × 4 - for which structural models were suggested. Prepared layers of Ce2O3/Cu(111) exhibiting the 4×4 reconstruction were identified as a cubic pha- se of Ce2O3 by the combination of all methods. The photoelectron spectroscopy study of the chemical state of layers revealed that reduction proceedes from the surface and oxidation is realised by oxygen diffusion into the volume.