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Ferroelectric Hf₁₋ₓZrₓO₂ Memories: device Reliability and Depolarization FieldsLomenzo, Patrick D., Slesazeck, Stefan, Hoffmann, Michael, Mikolajick, Thomas, Schroeder, Uwe, Max, Benjamin 17 December 2021 (has links)
The influence of depolarization and its role in causing data retention failure in ferroelectric memories is investigated. Ferroelectric Hf₀.₅Zr₀.₅O₂ thin films 8 nm thick incorporated into a metal-ferroelectric-metal capacitor are fabricated and characterized with varying thicknesses of an Al₂O₃ interfacial layer. The magnitude of the depolarization field is adjusted by controlling the thickness of the Al₂O₃ layer. The initial polarization and the change in polarization with electric field cycling is strongly impacted by the insertion of Al₂O₃ within the device stack. Transient polarization loss is shown to get worse with larger depolarization fields and data retention is evaluated up to 85 °C.
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