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Thesis (Ph. D.)--University of Texas at Austin, 2007. Thesis (Ph. D.)--Université Paul Sabatier, 2007. / Thesis completed in partial fulfillment of the requirements for a joint Ph. D. from the University of Texas at Austin and the Université Paul Sabatier. Vita. Includes bibliographical references.

This master thesis deals with examination of the parameters of low temperature plasma which is used for the deposition of thin layer of ITO. The method which is used in this thesis is the probe diagnostics. This thesis is divided into two parts. The first is the theoretical part, in which the basic parameters of low temperature plasma, principles of the probe diagnostics, and theories for this method are explained. The second part is the practical part, which presents the results of the measurement depending on changes in conditions of deposition.

An aim of this work is a research of a deposition process of indium tin oxide by plasma assisted methods. The thesis deals with plasma diagnostics, e.g. Langmuir probe diagnostics and optical emission spectroscopy, as well as describes experiments of film deposition including their diagnostics, e.g. absorption spectroscopy, X-ray diffractometry and atomic force microscopy.

Le carbone présente de nombreuses formes allotropiques, dont le graphite, qui possède une large variété de formes géométriques d'intérêt pour l'industrie. Ce travail de thèse a permis la synthèse d'une nouvelle de ces formes: les pyramides hexagonales. Ces cristaux submicroniques sont créés à partir de substrats de graphite par gravure en plasma radiofréquence (rf) Ar/H2 basse pression. Pour comprendre la formation de ces nouveaux cristaux, la caractérisation des plasmas a été effectuée par sondes de Langmuir et absorption résonante laser afin de vérifier la température de surface et d'estimer les flux et énergies des ions. L'évolution temporelle de la gravure a été directement observée en microscopie électronique à balayage (MEB). La gravure chimique (Ar/H2) a formé des cônes de graphite à hélices dont les paramètres cristallins et une amorphisation de surface, due à l'hydrogène, ont été révélés par microscopie électronique en transmission (MET). La vitesse de gravure et l'état de surface montrent, en fonction du mélange, une zone de transition caractérisée par l'absence de structures. La gravure physique (Ar pur) conduit à la création des pyramides hexagonales de graphite. Un modèle de formation de ces cristaux a pu être proposé grâce à une bonne connaissance des différentes conditions plasma et des études poussées de microscopies électroniques sur plusieurs types de substrats. Les analyses MET haute résolution ont montré des boucles fermant les plans de bord du cristal et liées à sa formation. Nous avons également maîtrisé l'état de surface des substrats de graphite hautement orienté (HOPG) en créant une densité homogène de pyramides dont la taille peut être contrôlée. / Carbon occurs as many different allotropic forms. One in particular, graphite, exhibits a remarkable variety of geometrical configurations largely used in industrial applications. This work permitted the synthesis of a novel crystalline form: the hexagonal-pyramidal graphite hillocks. These submicronic structures are created from graphite substrates by low pressure Ar/H2 radiofrequency (rf) plasma etching. In order to understand the formation of these new crystals, plasma characterization has been carried out by Langmuir probes and laser absorption spectroscopy to check the surface temperature and estimate the ion fluxes and energies. Etching kinetics has been directly observed by scanning electron microscopy (SEM). Chemical etching processes in pure hydrogen resulted in the creation of helical graphite cones whose crystal parameters and surface amorphisation have been revealed by transmission electron microscopy (TEM). The etching rate and surface topography as function of the gas mixture show a transition where no structures are created. The physical etching in pure argon creates hexagonal-pyramidal graphite hillocks. A formation model of these crystals has been proposed owing to a good knowledge of the different plasma conditions and thorough electron microscopy studies on two kinds of substrates. High resolution MET analyses showed graphene loops closing the edges planes along the crystal facets and related to the structure’s formation. We also showed the texturing of the surface of highly ordered graphite (HOPG) by creating a high and homogeneous density of crystals whose size may be controlled

High-resolution Thomson scattering system on the COMPASS tokamak provides electron temperature and density profiles in the central and edge plasma region. The spatial resolution in the edge plasma region is optimized for edge transport barrier studies. Formation of characteristic edge profiles (pedestals) is observed during high-confinement mode, i.e. the core electron temperature and density are raised up by the value of pedestal height. Both the electron and density pedestals are well-fitted by a modified hyperbolic tangent (mtanh) function, a five parameter model giving important parameters such as pedestal height and width, necessary for further analysis of the physics behind the transport barrier formation. A fitting technique of the full radial profiles of electron temperature, density and pressure during H-mode is also described. Using the fitting, electron temperature and density on top of pedestal are statistically processed to find a possible threshold for various H-mode regimes.