NDLTD Global ETD Search
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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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1

Static and Electrically Actuated Shaped MEMS Mirrors

Mi, Bin 08 March 2004 (has links)
No description available.
micromirrors
polysilicon
MultiPoly
MIRRORS
curvature
MEMS

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