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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films

Mráz, Stanislav January 2006 (has links) (PDF)
Zugl.: Aachen, Techn. Hochsch., Diss., 2006
Oxidschicht. Sputtern. Plasmachemie.

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