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Ferroelectric materials have been extensively studied theoretically and experimentally for many decades. Their ferroelectric, piezoelectric, pyroelectric, dielectric and electro-optical properties offer great promise in various applications such as non-volatile random access memory devices, non linear optics, motion and thermal sensors, and tunable microwave devices. Advanced applications for high dielectric constant insulators and nonvolatile memories in semiconductor industry have led to a meteoric rise of interest in the ferroelectrics recently. As most studied and technically important ferroelectric materials, lead zirconate titanate (PZT) and barium strontium titanate (BST) are widely investigated to understand their properties for potential device applications. Using radio frequency magnetron sputtering, single crystalline PZT and BST thin films have been achieved on SrTiO3 substrates, and been characterized for their structural and electrical properties. Eyeing their different potential applications, ferroelectric, pyroelectric and dielectric properties of PZT and BST thin films were studied. In addition, the introduction of bridge layers (nucleation or buffer layers) grown by molecular beam epitaxy (MBE) has been employed to facilitate the heterostructure growth of PZT thin films on GaN and BST thin films on sapphire substrates. Highly (111)-oriented perovskite PZT thin films were achieved on silicon-doped GaN (0001)/c-sapphire with a PbTiO3/PbO oxide bridge layer. And (001)-oriented BST thin films were grown on a-plane sapphire with an MgO/ZnO bridge layer. This dissertation also discusses the realization of PZT ferroelectric field effect transistors (FeFET). Two different 1T FeFET structures were successfully fabricated and their electrical properties were examined. Ferroelectric behavior was observed in the plot of source-drain current versus gate voltage where it exhibited a large counterclockwise hysteresis with 50% current modulation.

Research interest in complex oxides has resurged owing to progress in modern epitaxial techniques. Among such oxides, lead-titanate-based thin films such as PbTiO3 (PTO) and Pb(ZrxTi1−x)O3 (PZT) offer attractive advantages for a wide variety of applications. Moreover, integration between functional oxides with compound semiconductors has the potential to realize multi-functional devices which enjoy the properties from both groups of materials. Ferroelectric materials with a perovskite structure (ABO3) and semiconductors such as GaN with a hexagonal structure, require a careful choice of a bridge layer and suitable epitaxial technique. Molecular beam epitaxy (MBE) has been an established technique in providing epitaxial growth with high crystal perfection and precise control over material composition. Single-crystal oxides grown by molecular beam epitaxy (MBE) can in principle avoid grain boundaries and provide a sharp interface as well. In this dissertation, the MBE growth mechanism of PZT was investigated. In-situ RHEED patterns indicate that the growth of PTO and PZT occur in a two-dimensional, layer by layer mode, as confirmed by a streaky pattern. The crystal quality of PTO, PZO, and PZT thin films prepared by MBE are evaluated by X-ray diffraction (XRD), and have a full width at half maximum (FWHM) value of 4 arcmin for an 80nm thick layer. Optical properties of the PTO thin films have been characterized by variable angle spectroscopic ellipsometry (VASE), and well resolved dielectric functions are extracted. The refractive index is determined as 2.605 at 633 nm, and bandgap energy as 3.778eV. The electrical properties of the PTO and PZT are evaluated by the measurement of polarization-field hysteresis loops, give a remanent polarization of 83 μC/cm2 and a coercive field of 77 kV/cm. Lead oxide (PbO), titanium dioxide (TiO2), and zirconium dioxide (ZrO2), on GaN templates for potential PZT/GaN integration. The epitaxial growth of TiO2, PbO, and ZrO2 is realized on GaN templates for the first time by MBE. The PbO epitaxial layer was also used as a nucleation layer to enable single crystalline, perovskite PTO growth on GaN.

Orientador: Jozué Vieira Filho / Resumo: As técnicas de detecção de danos baseadas na Impedância Eletromecânica (EMI) baseiam-se na capacidade dos materiais piezoeléctricos em atuar como sensores e atuadores e contribuem para o desenvolvimento de sistemas de Structural Health Monitoring (SHM). As técnicas clássicas baseadas na EMI utilizam um transdutor Pb-Lead Zirconate Titanite (PZT ) ligado à estrutura monitorada e medem a assinatura de impedância do PZT. No entanto, as técnicas baseadas na EMI dependem de diferentes fatores, como faixa de frequência, número de PZT, temperatura ambiente, tipo de estrutura, entre outros. Assim, para demonstrar a eficácia dos métodos baseados na EMI, faz-se necessário realizar experimentos práticos, o que não é uma tarefa trivial, considerando tais fatores. Portanto, neste trabalho são estudados e propostos procedimentos para criar modelos numéricos, usando elementos finitos (FE), de técnicas baseadas na EMI usando o software PZFlex®. Além disso, os modelos desenvolvidos são usados para propor uma técnica inovadora de compensação de temperatura em sistemas baseados na EMI. Foram modeladas, simuladas e analisadas algumas estruturas clássicas como placa-de-alumínio/PZT e tubo-de-aço/PZT. Os resultados das simulações foram comparados com os equivalentes obtidos com modelos experimentais reais e mostraram-se fortemente correlacionados, indicando que o modelo proposto pode ser uma ferramenta poderosa para o desenvolvimento de técnicas de SHM baseadas na EMI. Foram realizadas simulações ... (Resumo completo, clicar acesso eletrônico abaixo) / Abstract: The damage detection techniques based on the Electromechanical Impedance (EMI) rely on the ability of piezoelectric materials in acting as sensors and actuators and contribute to the development of Structural Health Monitoring (SHM) systems. The classical EMI-based techniques use a Pb-Lead Zirconate Titanite (PZT) transducer bonded to the monitored structure and measure the impedance signature of the PZT. However, the techniques based on EMI depend on different factors, such as frequency range, number of PZTs, environmental temperature, type of structure, among others. Thus, to demonstrate the effectiveness of EMI-based methods, it is necessary to carry out practical experiments, which is not a trivial task considering such factors. Therefore, in this work, it is studied and proposed procedures to create numerical models of techniques based on the EMI, using finite elements (FE) and the PZFlex® software. In addition, the developed models are used to propose an innovative temperature compensation technique for EMI-based systems. Some classical structures were modelled, simulated and analyzed, such as aluminum plate/PZT and steel pipe/PZT. The results of the simulations were compared with the equivalents obtained by experimental models and showed to be strongly correlated, indicating that the proposed model can be a powerful tool for the development of EMI-based SHM techniques. Simulations were performed to analyze the behavior of the signatures under the effect of temperature,... (Complete abstract click electronic access below) / Doutor

This dissertation aims to apply piezoelectric materials as actuator and sensor to perform aeroelastic analysis. Two semi-span wing models based on flat plates with different characteristics were tested using PZT (Lead Zirconate Titanate) as actuator, PVDF (Polyvinylidene Fluoride) as sensor and the results were compared with vibrometer laser results. An aluminum model with a ballast on the wing tip, whose its location can be modified was tested in experimental modal analysis. Using the aluninum model, an investigation about aeroelastic behaviour was conducted in wind tunnel and the V-g/V-f diagram determined. This diagram shows the aeroelastic evolution of the natural frequencies and damping as function of speed (or dynamic pressure). In this aeroelastic analysis, the ability of the PVDF in determining the V-g/V-f diagram was evaluated. A numerical model of composite flat plate was generated considering the piezoelectric instrumentations. The second specimen tested corresponds to composite wing models that are based on laminate composite flat plate. Five models with different fiber orientations were tested in (pure) experimental modal analyses and wind tunnel, hence, the capability of excitation of PZT was verified. Good results were obtained regarding the estimation of natural frequency and damping factor using a single PVDF element. The application of PZT as actuator in the wind tunnel test showed improvement on the data acquisition in terms of noise. However, were observed some characteristics that require careful. As support to experimental tests, several studies were performed.

Les transformateurs piézoélectriques se positionnent aujourd’hui comme une alternativetechnologique séduisante face aux solutions classiquement utilisées pour la génération desplasmas froids. Leur haute permittivité, leur faible tension d’alimentation et leur capacité deminiaturisation en font une solution sérieuse et originale pour de nombreuses applications faiblespuissances, notamment dans le domaine biomédical pour la stérilisation, le traitement de surfaceet la décontami-nation des instruments médicaux. Dans le cadre d'un fonctionnement engénérateur plasma, la conversion électromécanique au sein du transformateur s’accompagne depertes mécaniques et diélectriques, souvent converties en chaleur. À ces effets s'ajoute l’influenceproprement dite de la décharge sur le comportement électrique du dispositif. L’évolutiondynamique et fortement non-linéaire de la décharge entraine un comportement méconnu desgrandeurs électriques. Par conséquent, l’étage d’alimentation du transformateur constitue un sujetd’étude au même titre que le transformateur lui-même. De plus, étant donné la configuration duprocessus de génération, qui positionne le matériau piézoélectrique comme source et siège de ladécharge plasma, il devient nécessaire d’analyser la viabilité du dispositif. L’ionisation du milieugazeux environnant le générateur provoque des effets électroniques complexes, susceptiblesd’entrainer des dépôts de matière à la surface du matériau ou d’en éroder la surface. C’est dansce cadre, à l’interface entre le génie électrique et la science des matériaux, que s’articule cettethèse. Une première partie est destinée au développement d’un outil de commande numérique dugénérateur par une boucle de verrouillage de phase, assurant sa continuité de fonctionnementface aux variations des conditions opératoires. Par la suite, une modélisation du générateurplasma dans des configurations proches des décharges à barrières diélectriques est effectuée ;des simulations permettent une estimation de la puissance de décharge à partir d’uneidentification expérimentale des paramètres du modèle. Dans un deuxième temps, nouscherchons à établir une corrélation entre la structure du matériau et ses propriétés électriques ens’appuyant sur une méthodologie de caractérisation multi-échelle, avant et après déchargeplasma. L'étude se focalise principalement sur l'évolution en surface de la structure cristalline et lacomposition chimique, en liaison avec les propriétés fonctionnelles du transformateur aprèsgénération de la décharge. Enfin, une étude en température porte sur l’investigation des effetsd’auto-échauffement du générateur dans ce mode de fonctionnement

O objetivo deste trabalho é apresentar uma solução funcional de um mecanismo de corte de cerâmicas por abrasão, para possibilitar a construção de transdutores piezocompósitos de ultra-som através do método \"Dice and Fill\". Esse trabalho apresenta a teoria necessária para entender como funciona o desgaste por abrasão em cerâmicas e quais as variáveis que mais influenciam nesse desgaste. São apresentados também os requisitos e as características do corte que devem ser feitos nas piezocerâmicas, bem como os cálculos de dimensionamento da taxa de desgaste através da fórmula de desgaste de Archard. Através dos resultados experimentais e práticos essa dissertação mostra como regular o equipamento para funcionar em sua máxima eficiência. / The objective of this work is to describe one great and simple mechanism that is capable of machining PZT ceramic by wear. That mechanism will be used to produce piezocomposites transducers more easily by the \"Dice and Fill\" method. This work also explains how the ceramic material can be worn and which variables are important in this wear. It is also presented the requirements and characteristics of the ceramic cuts to build an ultrasonic transducer and showed how to predict the wear in the ceramic by using the Archard\'s formula. Finally all parts of the cut mechanism are described and the practical results of the study are used to setup the mechanism to work in the maximum efficiency.

Pulsed laser deposition has been used to grow Pb(Zr₀.₅₂Ti₀.₄₈)O₃ (PZT)/LaNiO₃ (LNO) heterostructures with restricted crystallographic orientations on bare Si(001) and SiO₂-coated Si(001) substrates, using TiN buffer layers. The effect of background gas pressure on orientation of the thin films was investigated in detail. XRD analyses showed that under optimized conditions, (001)-oriented PZT/LNO/TiN heterostructures could be grown on either Si(001) or SiO₂/Si substrates. The (001)-textured PZT films had remnant polarizations as high as 23µC/cm², and also had a low coercive field. Up to 10¹⁰ switching cycles have been achieved in these PZT films. / Singapore-MIT Alliance (SMA)

The degradation of astronomical images caused by atmospheric turbulence will be much more severe in the next generation of terrestrial telescopes and its compensation will require deformable mirrors with up to tens-of-thousands of actuators. Current designs for these correctors consist of scaling up the proven technologies of flexible optical plates deformed under the out-of-plane action of linear actuators. This approach will lead to an exponential growth of cost with the number of actuators, and in very complex mechanisms. This thesis proposes a new concept of optical correction which is modular, robust, lightweight and low-cost and is based on the bimorph in-plane actuation. The adaptive mirror consists of segmented identical hexagonal bimorph mirrors allowing to indefinitely increase the degree of correction while maintaining the first mechanical resonance at the level of a single segment and showing an increase in price only proportional to the number of segments. Each bimorph segment can be mass-produced by simply screen-printing an array of thin piezoelectric patches onto a silicon wafer resulting in very compact and lightweight modules and at a price essentially independent from the number of actuators. The controlled deformation of a screen-printed bimorph mirror was experimentally achieved with meaningful optical shapes and appropriate amplitudes; its capability for compensating turbulence was evaluated numerically. The generation of continuous surfaces by an assembly of these mirrors was numerically simulated and a demonstrator of concept consisting of 3 segments was constructed.

This thesis presents actuators used in autonomous microsystems. Characteristic for all actuators presented is the low drive voltage and the low power consumption. Different motion mechanisms have been studied and applied in various locomotion modules for microrobots. High resolution movement of a monolithic piezoceramic PZT rotational arm module, using a quasi-static motion mechanism, was demonstrated in a 10x10x20 mm3 autonomous robot. The rotational arm comprises multilayer PZT bimorphs and is fabricated by a wet-building technology. The multilayer approach enables operation of the modules at the low drive voltages provided by the robot electronics. In addition a locomotion module has been designed and fabricated based on the above principles. A three-legged locomotion module with piezoceramic unimorphs, moving by tapping the legs against the floor, has been investigated. Characteristics such as low power consumption, high velocities, low drive voltages and a high weight carrying capability were demonstrated using a resonant motion mechanism. Highly miniaturized three-legged locomotion modules were developed for a 3x3x3 mm3 autonomous microrobot. The modules comprise a multilayer structure of the electroactive copolymer P(VDF-TrFE) on a flexible printed circuit board (FPC) substrate. A novel multilayer fabrication process suitable for mass production was used. It is based on sequential deposition of spun cast copolymer with evaporated aluminum electrodes. Reactive ion etching is used to microstructure the copolymer and the FPC. The mechanical deformability of the FPC is exploited when folding the 2D FPC-multilayer assembly into 3D locomotion modules. Locomotion was demonstrated by moving a glass slider corresponding to the robot weight. A modular building technology for microsystems is presented. It uses surface mounting technology and conductive adhesives to assemble modules on a double-sided FPC. Complex geometries were achieved by subsequent folding the FPC. The feasibility of the technology was demonstrated by assembly of the 3x3x3 mm3 autonomous microrobots.