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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Showing 1 to 3 of 3 (0.104 seconds)
1

Drift-Induced Step Instabilities Due to the Gap in the Diffusion Coefficient

Sato, Masahide, Uwaha, Makio, Saito, Yukio 15 February 2005 (has links)
No description available.
Morphological stability
Computer simulation
Semiconducting silicon
2

Change in the branch period of the step pattern formed by a moving linear source : initial coarsening and effect of an abrupt change in the velocity

Uwaha, Makio, Sato, Masahide, Kawaguchi, Masashi, Kondo, Shinji 01 1900 (has links)
No description available.
B2. Semiconducting silicon
A3. Physical vapor deposition processes
A1. Surface processes
A1. Morphological instability
3

Gray-box modeling and model-based control of Czochralski process producing 300 mm diameter Silicon ingots / 直径300mmのシリコンインゴットを製造するチョクラルスキープロセスのグレーボックスモデリング及びグレーボックスモデルに基づく予測制御

Kato, Shota 23 March 2022 (has links)
京都大学 / 新制・課程博士 / 博士(情報学) / 甲第24040号 / 情博第796号 / 新制||情||135(附属図書館) / 京都大学大学院情報学研究科システム科学専攻 / (主査)教授 加納 学, 教授 大塚 敏之, 教授 下平 英寿 / 学位規則第4条第1項該当 / Doctor of Informatics / Kyoto University / DGAM
Czochralski process
Gray-box model
Model predictive control (MPC)
Successive linearization
Moving horizon estimation
Semiconducting silicon
007

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