Experimental and numerical investigation of the thermomechanical response of reticles during the optical lithography process /

Description

Thesis (Ph. D.)--University of Wisconsin--Madison, 2003. / Includes bibliographical references. Also available on the Internet.

Links & Downloads

1. http://www.library.wisc.edu/databases/connect/dissertations.html

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/53956697
Date	January 2003
Creators	Abdo, Amr Yehia.
Source Sets	OCLC
Language	English
Detected Language	English