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Design and development of a silicon carbide chemical vapor deposition reactor

Thesis (M.S. Ch. E.)--University of South Florida, 2003. / Title from PDF of title page. Document formatted into pages; contains 86 pages. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/53994144
Date January 2003
CreatorsSmith, Matthew T.
Publisher[Tampa, Fla.] : University of South Florida,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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