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Resist and Residue Removal Using Gas-Expanded Liquids

Thesis (Ph. D.)--Chemical Engineering, Georgia Institute of Technology, 2003. / Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/54061526
Date January 2003
CreatorsSpuller, Matthew Thomas.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, (2003)

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