Chemnitz, Techn. Univ., Diss., 2007. / Zugl. ersch. im Shaker Verl. Aachen, ISBN 978-3-8322-6348-5, - Parallelt.: Control engineered analysis and synthesis of MEMS with the electrostatic principle.
Identifer | oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/315290986 |
Date | January 2007 |
Creators | Wolfram, Heiko, |
Publisher | [S.l. : s.n.], |
Source Sets | OCLC |
Language | German |
Detected Language | English |
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