The complementary metal-oxide-semiconductor (CMOS) scaling process of the recent decades, coupled with new device structures and materials, has aggravated thermal problems and turned them into major reliability issues for deeply-scaled devices. As a consequence, the thermal transport dynamic and its impact on the device performance at submicron dimensions is established as a contemporary theme. In this context, a new selfconsistent electro-thermal particle-based device simulator for the study of self-heating effects in p-type metal-oxide-semiconductor field-effect transistors (MOSFETs) based in silicon is developed and presented. The electrical module of the tool utilizes the Ensemble Monte Carlo method to perform the charge transport, whereas the thermal module evaluates the non-isothermal temperature profiles by solving the phonon energy balance equations for both acoustic and optical phonon baths. These temperature profiles are fed back into the electrical module, which adjusts the carriers’ scattering rate accordingly, thus, properly accounting for the device current capability degradation. The developed tool proved to be suitable for sub-100 nm device simulations, and it was used to perform relevant case study simulations of 24-nm channel length bulk and fully-depleted siliconon- insulator (FD-SOI) MOSFETs. General device parameters extracted from the simulations are qualitatively in agreement with the expected behavior, as well as data from the literature, ensuring the proper operation of the tool. Electro-thermal simulations of bulk and FD-SOI devices provided both acoustic and optical phonon temperature profiles across the transistor structure, as well as the heat generation map and the device power dissipation. Some results were also extracted via Joule heating thermal model, and they are presented for comparison. The current degradation due to self-heating was found to be significant for FD-SOI devices, but very modest for bulk ones. At a fixed bias point of VD =VG = 1:5 V, for instance, bulk devices presented a current variation of as much as 0:75%, whereas for FD-SOI devices it reached up to 8:82% for Tgate = 400 K. Hot spot acoustic (lattice) and optical phonon temperatures were extracted as a function of the applied bias for both topologies. The lattice temperature rise, for instance, exceeded 10 K and 150 K over the heat sink temperature for bulk and FD-SOI transistors, respectively, observing the same bias point and gate temperature presented earlier. The particle-based nature of the tool is also suitable for the study of the impact of trap activity in MOSFETs and its interplay with self-heating effects. Simulations of charge traps were used to analyze the statistical distribution of the current deviations in 25-nm bulk MOSFETs due to traps. The simulations showed that these deviations are exponentially-distributed, as experimentally observed and reported in the literature. Electro-thermal simulations of charge traps in bulk and FD-SOI transistors revealed that the largest degradation on the device current occurs when the effects of self-heating and trap activity take place simultaneously. At lower biases, the impact of charge traps dominates the current degradation, whereas the self-heating component prevails for larger biases.
| Identifer | oai:union.ndltd.org:IBICT/oai:www.lume.ufrgs.br:10183/186033 |
| Date | January 2018 |
| Creators | Rossetto, Alan Carlos Junior |
| Contributors | Wirth, Gilson Inacio |
| Source Sets | IBICT Brazilian ETDs |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/publishedVersion, info:eu-repo/semantics/doctoralThesis |
| Format | application/pdf |
| Source | reponame:Biblioteca Digital de Teses e Dissertações da UFRGS, instname:Universidade Federal do Rio Grande do Sul, instacron:UFRGS |
| Rights | info:eu-repo/semantics/openAccess |
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