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The Design Of A Nanolithographic Process

Thesis (Ph. D.)--Duke University, 2007. / Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/298112561
Date January 2007
CreatorsJohannes, Matthew Steven,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic dissertations.

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