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Modeling and control of surface micromachined thermal actuators /

Thesis (M.S.)--Brigham Young University. Dept. of Mechanical Engineering, 2004. / Includes bibliographical references (p. 51-54).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/55632824
Date January 2004
CreatorsMessenger, Robert K.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic dissertations.
SourceCLICK HERE for online access

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