We use an atomic force microscope to perform nanolithography by local oxidation on two-dimensional electron gases. We study the oxidation process under different environmental conditions. It is found that oxide growth is hindered at high temperature and affected by ozone. These findings help us to understand the role of the water film present on the surface, and lead us to propose a mechanism that would avoid its widening effect. We develop a new lithography technique, diamond scribe scratching, and use it to make coarse mesoscopic structures. Then, we combine diamond scribe scratching and local oxidation to fabricate working mesoscopic structures, namely quantum point contacts.
| Identifer | oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:QMM.98744 |
| Date | January 2005 |
| Creators | Landry, Olivier. |
| Publisher | McGill University |
| Source Sets | Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada |
| Language | English |
| Detected Language | English |
| Type | Electronic Thesis or Dissertation |
| Format | application/pdf |
| Coverage | Master of Science (Department of Physics.) |
| Rights | © Olivier Landry, 2005 |
| Relation | alephsysno: 002494689, proquestno: AAIMR24714, Theses scanned by UMI/ProQuest. |
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