Return to search

THE MECHANICAL PROPERTIES OF AMORPHOUS SILICON CARBIDE FILMS DEPOSITED BY PECVD AND RF SPUTTERING FOR APPLICATION AS A STRUCTURAL LAYER IN MICROBRIDGE-BASED RF MEMS

No description available.

1. http://rave.ohiolink.edu/etdc/view?acc_num=case1270241057

Identifer	oai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:case1270241057
Date	17 May 2010
Creators	Parro, Rocco John, III
Publisher	Case Western Reserve University School of Graduate Studies / OhioLINK
Source Sets	Ohiolink ETDs
Language	English
Detected Language	German
Type	text
Source	http://rave.ohiolink.edu/etdc/view?acc_num=case1270241057
Rights	unrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.