There has been an increase in demand for the wafer-level test techniques that evaluates
the functionality and performance of the wafer chips before packaging them, since the
trend of integrated circuits are getting more sophisticated and smaller in size. Throughout
the wafer-level test, the semiconductor manufacturers are able to avoid the unnecessary
packing cost and to provide early feedback on the overall status of the chip fabrication
process. A probe card is a module of wafer-level tester, and can detect the defects of the
chip by evaluating the electric characteristics of the integrated circuits(IC's). A probe card
analyzer is popularly utilized to detect such a potential probe card failure which leads to
increase in the unnecessary manufacture expense in the packing process.
In this paper, a new probe card analysis strategy has been proposed. The main idea in
conducting probe card analysis is to operate the vision-based inspection on-the-
y while the
camera is continuously moving. In doing so, the position measurement from the encoder is
rstly synchronized with the image data that is captured by a controlled trigger signal under
the real-time setting. Because capturing images from a moving camera creates blurring in
the image, a simple deblurring technique has been employed to restore the original still
images from blurred ones. The main ideas are demonstrated using an experimental test
bed and a commercial probe card. The experimental test bed has been designed that
comprises a micro machine vision system and a real-time controller, the con guration of
the low cost experimental test bed is proposed. Compared to the existing stop-and-go
approach, the proposed technique can substantially enhance the inspection speed without
additional cost for major hardware change.
| Identifer | oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:OWTU.10012/7803 |
| Date | January 2013 |
| Creators | Shin, Bonghun |
| Source Sets | Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada |
| Language | English |
| Detected Language | English |
| Type | Thesis or Dissertation |
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