The lithium tantalite [LiTaO3,abbreviated to LT] thin films were deposited on Pt/SiO2/Si substrates by spin coating with sol-gel processing and rapid thermal processing in this thesis. 1,3 propanediol was used as solvent to minimize the number of cycles of spin coating and drying processes to obtain the desired thickness of thin film. By changing the heating rate (600~3000¢J/min) and the heating temperature (500~800¢J), the effects of various processing parameters on the thin films growth are studied. The effects of various heating rate on the response of pyroelectric IR detector devices are studied also.
Experimental results reveal that the heating rate will influence strongly on grain size, dielectricity, ferroelectricity and pyroelectricity of LT thin films. With the increase of heating rate, the grain size of LT thin film decreases slightly, and the C-axis orientation is enhanced. The relative dielectric constant of LT thin film increases from 28 up to 45.6, the tand increases from 0.033 to 0.134, Ec increases from 122 KV/cm to 183 KV/cm, Pr increases from 7.45 mC/cm2 to 12.12 mC/cm2, and g increases from 9.33´10-9 C/cm2K up to 2.66´10-8 C/cm2K, respectively, as the heating rate increases form 600 up to 3000¢J/min. In addition, the results also show that the LT thin film possesses the largest figures of merit Fv (2.19¡Ñ10-10 Ccm/J) and Fm (4.01¡Ñ10-9 Ccm/J) at the heating temperature of 700¢J and heating rate of 1800¢J/min. The voltage responsivities (Rv) measured at 80 Hz increase from 5496 to 8455 V/W and the specific detecivities (D*) measured at 300 Hz increase from 1.94¡Ñ108 to 2.38¡Ñ108 cmHz1/2/W with an increase of heating rate from 600 to 1800¢J/min. However, the voltage responsivity and the specific detecivity decrease with heating rate in excess of 1800¢J/min. The results show that LT1800 pyroelectric thin film detector exists both the maximums of voltage responsivity and specific detecivity. Therefore, LT1800 thin film exhibits the best IR characteristics for detector material.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0716102-154745 |
| Date | 16 July 2002 |
| Creators | Li, Yi-Ju |
| Contributors | Chih-Yu Huang, Cheng-Fu Yang, Maw-Shung Lee, Chih-Yeh King, Ying-Chung Chen |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0716102-154745 |
| Rights | campus_withheld, Copyright information available at source archive |
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