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Příprava vzorků nanostruktur v SEM/FIB a jejich studium v transmisním elektronovém mikroskopu / Preparation of nanostructure samples in SEM/FIB and their study in TEM

This work is studying the layers of cerium oxide (doped with platinum) prepa- red by magnetron sputtering on different types of substrates. Attention is focused mainly on modes of growth and morfology of (Pt−)CeO2 layers. The study was carried out by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The specimens (lamellas) were created by using focused ion beam (FIB) with respect to transparency for electron beam and material contrast. The emphasis was on elimination of redeposition and minimize the amorphous layer of lamella. Representation of elements was determined by energy-dispersive spectroscopy (EDX) and electron-energy loss spectroscopy (EELS). 1

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:310834
Date January 2012
CreatorsLavková, Jaroslava
ContributorsMatolínová, Iva, Pešička, Josef
Source SetsCzech ETDs
LanguageSlovak
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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