Recently the semiconductor industry tends to develop a smaller volume device and system with lower power consumption, lower leakage current, and high speed performance. SOI technology having many unique characteristics is one of the most hopeful methods in the direction. As semiconductor memory is concerned, The 1T-DRAM cell realized by the concept of floating body effect in a PD-SOI nMOSFET, that can allow DRAM cell to be scaled down in depth with less area occupied .In this paper, we will propose a new structure of 1T-DRAM cell, which has the buried oxide and block oxide around its body. It can suppress the junction capacitor between the S/D and the body of the cell. In addition it can also improve the programming window of the 1T-DRAM cell more than 80% by utilizing its own structural characteristic.
We fabricated our new device in National Nano Device Laboratories. The device was carried out by depositing oxide and poly film on bulk Si wafer, just like TFT process. But doing by this way it has some issues about the polycrystalline channel and the S/D. Although it has some issues, but we made it successful using bulk Si wafer rather than expensive SOI wafer. It indeed reduces the cost of process.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0731106-174329 |
| Date | 31 July 2006 |
| Creators | Chang, Chong-Lin |
| Contributors | Jyi - Tsong - Lin, Chia-Hsiung Kao, James B. Kuo, Albert Chin, Shu - fen Hu, Yao - Tsung - Tsai |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0731106-174329 |
| Rights | not_available, Copyright information available at source archive |
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