Doctoral thesis is dealing with the methods for analysis of surfaces by photoelectrons being emitted by X-ray radiation. The methods are: X-ray Photoelectron Spectroscopy - XPS, Angle-resolved XPS - ARXPS and X-ray Photoelectron Diffraction - XPD. The work is especially focused on a method of ARXPS, which is used for the depth compositional analysis of sample surfaces. To obtain an information about the depth composition from the measured ARXPS spectra, a calculation software in the Matlab environment has been developed. The software has been tested both for simulated and real sample data. For an experimental implementation of these methods, a complete manipulation system has been developed. It ensures the transport of samples inside a vacuum apparatus and the experiment itself. The system is controlled mainly by a software and enables to run the experiments automatically.
Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:233975 |
Date | January 2011 |
Creators | Polčák, Josef |
Contributors | Zemek, Josef, Cháb, Vladimír, Šikola, Tomáš |
Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
Source Sets | Czech ETDs |
Language | Czech |
Detected Language | English |
Type | info:eu-repo/semantics/doctoralThesis |
Rights | info:eu-repo/semantics/restrictedAccess |
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