In this work, general properties of fundamental gas sensors are described. Thesis is mainly focused on chemoresistive and ChemFET types, which are further used in experimental part. Subsequently, properties, preparation and transfer methods of chosen 1D and 2D materials are described. Experimental part of this work describes design and fabrication of chips, which combine the sensing principals mentioned above for utilization of 1D and 2D materials as an active layer. Transfer methods of individual materials on fabricated chips are described and these materials are characterized by Raman spectroscopy and field effect transistor characteristics measurements. Finally, the response of chosen materials to oxidative and reductive gases is measured.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:442589 |
| Date | January 2021 |
| Creators | Brodský, Jan |
| Contributors | Glowacki, Eric Daniel, Gablech, Imrich |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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