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Dynamics of ions and neutral particles in the sheath region of processing plasmas

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:392428
Date January 2002
CreatorsWade, Neal S.
PublisherUniversity of Glasgow
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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