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Liquid injection MOCVD of hafnium oxide, silicate and aluminate high-k dielectrics

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:422113
Date January 2005
CreatorsMarshall, Paul Andrew
PublisherUniversity of Liverpool
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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