Laser and optical emission spectroscopies have been employed to study the gas phase chemistry in the growth environment for diamond chemical vapour deposition (CVO) in a microwave (MW) reactor. Computational investigations have also been used to explore the energetics of elementary reactions on a diamond surface, to give insight into which species are likely to incorporate into a growing diamond film. The focus of this thesis is on 0 and N containing CIH plasmas.
Identifer | oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:653079 |
Date | January 2014 |
Creators | Kelly, Mark |
Publisher | University of Bristol |
Source Sets | Ethos UK |
Detected Language | English |
Type | Electronic Thesis or Dissertation |
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