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Characterization of mechanical and optical properties of x-ray mask membranes

Flora S. Tsai. / Includes bibliographical references (leaves 48-49). / Research supported by the National Science Foundation. ECS 90-16437 Research supported by the Naval Research Laboratory. N00014-90-K-2018

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/4188
Date January 1991
ContributorsTsai, Flora S.
PublisherResearch Laboratory of Electronics, Massachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
Format49 leaves, 2055944 bytes, application/pdf
RelationTechnical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.

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