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A spectroscopic study of modified tetrahedral amorphous carbon (ta-C) and hydrogenated amorphous carbon (a-C:H) films for diffusion barrier applications

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:412130
Date January 2004
CreatorsAbbas, Gamal A.-W.
PublisherUniversity of Ulster
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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