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A novel fabrication technique of silicon germanium-on-insulator (SGOI) for SIGe heterostructure CMOS technology

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:416442
Date January 2005
CreatorsYuk, Hyung-Sang
PublisherImperial College London
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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