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Novel components by magnetron sputtering

The advent of the closed field unbalanced magnetron sputtering (CFUBMS) technique has provided a novel method for the production of ultra thick multilayer coatings, which form free standing foils when removed from the substrate. Applications for this method range from the production of complex metal/ceramic probe tips, to an alternative route for the production of axisymmetric high precision-machined components, such as a bellows component used in the production of uranium enrichment by the sponsors of this project, Urenco (Capenhurst) Ltd. In this study the CFUBMS system was developed to grow metallic and reactive compound multilayer foils. These foils were tested for compatibility with uranium hexafluoride, UF6 , a corrosive gas used in the production of enriched uranium that is also in contact with the bellows component.

Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:491045
Date January 2005
CreatorsBrookes, Marc
PublisherUniversity of Salford
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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