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Microstructure and electrical performance of sputter-deposited Hafnium oxide (HfO₂) thin films

Thesis (M.S.)--University of Texas at El Paso, 2009. / Title from title screen. Vita. CD-ROM. Includes bibliographical references. Also available online.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/608258049
Date January 2009
CreatorsAguirre, Brandon A.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceTo access this resource online via ProQuest Dissertations and Theses @ UTEP

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