Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005 / Perhaps more popular than the piezoresistive type are the capacitive type of
micromachined accelerometers. The capacitive accelerometer has many fine
characteristics, such as simple structure, high sensitivity, strong ability of resisting
disturbance, fast dynamic response and so on. It can also work under abominable
condition. So it is occupying an important status in the technology of electronical
measurement and being used in many kinds of metrical systems.
In this paper, the capacitive accelerometer (CA) we will introduce and design is a
parallel plate CA with crab-shape. It will detect the acceleration signal by the change
of distance between two electrode plates, and its design standard came from the
industrial requirements ofKENTRON Company. The whole paper can be divided into
four main phases-introduction, study, design and analysis.
At first, we have introduced the purpose and background of this thesis, and then the
study and the discussion of relative literature. The content of these articles is mainly
about the basic principle, types and applications of micro-sensors and this information
will be very helpful to the design and analysis ofmy own CA.
The course of design is primarily structure design. The main structures of CA are
parallel plate structure and cylinder structure. The parallel plate structure is chosen for
our CA after we did the comparison of performance and technique of making between
these two types of structures. We use the concentrative mass as the top electrode plate
and four beams are connected on the two sides of the plate separately.
| Identifer | oai:union.ndltd.org:netd.ac.za/oai:union.ndltd.org:cput/oai:localhost:20.500.11838/1282 |
| Date | January 2005 |
| Creators | Guo, Fei |
| Publisher | Cape Peninsula University of Technology |
| Source Sets | South African National ETD Portal |
| Language | English |
| Detected Language | English |
| Type | Thesis |
| Rights | http://creativecommons.org/licenses/by-nc-sa/3.0/za/ |
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