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Investigation of micromachining techniques and simulation methods for the development of novel integrated accelerometer structures including the feasibility study of a novel integrated acceleration sensor /

Thesis (PhD)--University of South Australia, 1997

Identiferoai:union.ndltd.org:ADTP/268090
CreatorsMurfett, David B.
Source SetsAustraliasian Digital Theses Program
LanguageEnglish
Detected LanguageEnglish
Rightscopyright under review

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