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Bulk-micromachined capacitive servo-accelerometer

Thesis (doctoral)--Technische Universiteit Delft, 1995. / Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/604715768
Date January 1995
CreatorsKampen, Robertus Petrus van,
Publisher[Delft] : Delft University Press,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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