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Fabrication and modeling of electrostatic actuators for high frequency applications

No description available.
Identiferoai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/11170
Date05 1900
CreatorsChinthakindi, Anil Kumar
PublisherGeorgia Institute of Technology
Source SetsGeorgia Tech Electronic Thesis and Dissertation Archive
Languageen_US
Detected LanguageEnglish
TypeThesis
Format243 bytes, text/html
RightsAccess restricted to authorized Georgia Tech users only.

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