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Aluminum nitride deposition / characterization & pMEMS / saw device simulation / fabrication

Thesis (M.S.)--West Virginia University, 2009. / Title from document title page. Document formatted into pages; contains xvii, 169 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 147-155).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/355806454
Date January 1900
CreatorsPagán, Vincent Richard.
PublisherMorgantown, W. Va. : [West Virginia University Libraries],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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