The master‘s thesis is focused on issue of pumping in the experimental pumped chambre of an environmental scanning microcope. In the theoretical part, there are presented microscopy as science. Afterwards the thesis is focused on electron microscopy and its problem and vakuum system, computer program used for preparation of simulation and study that the experimental part is based on. The experimental part contains the results of gas flow in the differential pumped chambre. The problematics were solved by Ansys Fluent system.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:442558 |
| Date | January 2021 |
| Creators | Balobanov, Damir |
| Contributors | Bílek, Michal, Maxa, Jiří |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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