Prediction of steady state response in dynamic mode atomic force microscopy and its applications in nano-metrology

Description

Thesis (Ph. D.)--Ohio State University, 2005. / Title from first page of PDF file. Includes bibliographical references (p. 182-189).

Links & Downloads

1. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=osu1135222817

Tags

Atomic force microscopy Metrology.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/70122666
Date	January 2005
Creators	Oh, Yunje,
Publisher	Columbus, Ohio : Ohio State University,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Connect to resource online