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Elektronenspektroskopie und Faktoranalyse zur Untersuchung von ionenbeschossenen Metall (Re, Ir, Cr, Fe)-Silizium-Schichten

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1. urn:nbn:de:swb:14-994160101234-34968
2. 092756794
3. https://tud.qucosa.de/id/qucosa%3A24738
4. https://tud.qucosa.de/api/qucosa%3A24738/attachment/ATT-0/

Identifer	oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:24738
Date	07 February 2000
Creators	Reiche, Rainer
Contributors	Wetzig, Klaus, Szargan, R., Möller, Wolfhard
Publisher	Technische Universität Dresden
Source Sets	Hochschulschriftenserver (HSSS) der SLUB Dresden
Language	German
Detected Language	German
Type	doc-type:doctoralThesis, info:eu-repo/semantics/doctoralThesis, doc-type:Text
Rights	info:eu-repo/semantics/openAccess