Return to search

Ultra-shallow junction formation co-implantation and rapid thermal annealing /

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/54053256
Date January 2002
CreatorsLi, Hong-jyh.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

Page generated in 0.0021 seconds