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Development and Simulation Assessment of Semiconductor Production System Enhancements for Fast Cycle Times

Long cycle times in semiconductor manufacturing represent an increasing challenge for the industry and lead to a growing need of break-through approaches to reduce it. Small lot sizes and the conversion of batch processes to mini-batch or single-wafer processes are widely regarded as a promising means for a step-wise cycle time reduction. Our analysis with discrete-event simulation and queueing theory shows that small lot size and the replacement of batch tools with mini-batch or single wafer tools are beneficial but lot size reduction lacks persuasive effectiveness if reduced by more than half. Because the results are not completely convincing, we develop a new semiconductor tool type that further reduces cycle time by lot streaming leveraging the lot size reduction efforts. We show that this combined approach can lead to a cycle time reduction of more than 80%.

Identiferoai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:25248
Date29 January 2010
CreatorsStubbe, Kilian
ContributorsRose, Oliver, Mönch, Lars, Technische Universität Dresden
Source SetsHochschulschriftenserver (HSSS) der SLUB Dresden
LanguageEnglish
Detected LanguageEnglish
Typedoc-type:doctoralThesis, info:eu-repo/semantics/doctoralThesis, doc-type:Text
Rightsinfo:eu-repo/semantics/openAccess

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